摘要
电子级硫酸属于超净高纯试剂,是一种微电子技术发展过程中不可缺少的关键基础化学试剂。本文基于精馏脱杂技术、超纯水吸收技术、精馏脱轻技术、精馏脱重技术,提出了一种优化的G1—G5电子级硫酸的制备方法,并将该方法与传统电子级硫酸制备方法进行了对比。本方法制备原材料来源广泛,可实现G1—G5电子级硫酸的选择性制备,且能耗更低,效率更高,具有较好的经济性,适于投入工业生产。
Electronic grade sulfuric acid is an ultra-clean and high-purity reagent,which is an indispensable key basic chemical reagent in the development of microelectronic technology.In this paper,an optimized preparation method of G1—G5 electronic grade sulfuric acid is proposed based on rectification decontamination technology,ultrapure water absorption technology,rectification delight technology and rectification deweight technology.The preparation methods of sulfuric acid were compared.The method has wide sources of raw materials,can realize the selective preparation of G1—G5 electronic grade sulfuric acid,has lower energy consumption,higher efficiency,better economy,and is suitable for industrial production.
作者
赵怡
孙同乐
ZHAO Yi;SUN Tongle(Nanjing Jiahua Engineering Technology Co.,Ltd,Nanjing Jiangsu 210009,China;Shandong Genyuan Biotechnology Co.,Ltd,Weihai Shandong 264200,China)
出处
《江西化工》
2022年第5期117-121,共5页
Jiangxi Chemical Industry
关键词
电子级硫酸
工业生产
精馏脱杂
Electronic grade sulfuric acid
industrial production
Rectification and decontamination
