摘要
为提高离轴三反消像散(TMA)光学系统中次镜的制造效率和精度,开展了离轴凸非球面反射镜组合加工和零位检测的研究工作。首先,介绍了方形(298 mm×264 mm)高次离轴凸非球面反射镜的光学参数、技术指标和总体加工路线;其次,提出了铣磨加工工艺策略以及基于气囊和沥青的小磨头组合加工工艺;最后,阐述了光学零件抛光阶段采用的背部透射零位补偿检测法和Offner型零位补偿器,并采用光线追迹法对镜片的零位补偿检验面形畸变进行了矫正,最终面形RMS值为0.025λ(λ=632.8 nm),满足技术指标要求。上述组合加工工艺和背部透射零位补偿检测方案可以显著提升高次离轴凸非球面反射镜的加工精度和效率。
In order to improve the manufacturing accuracy and efficiency of the secondary mirror in the off-axis three mirror anastigmatic(TMA), the combined fabrication and testing technologies of the off-axis convex aspheric mirror were studied. Firstly, the optical parameters, technical specifications and overall processing route of square(298 mm×264 mm) high order off-axis convex aspheric mirror were introduced. Then, the grinding processing strategy and the combined processing technology based on bonnet and pitch polishing were presented.At last, offner-type compensator was used to meet the back transmission null lens testing in the polishing stage,and then the surface distortion was corrected by ray tracing method, the final RMS value was 0.025λ(λ=632.8 nm), which meet the target requirements. The above combined processing technology and back transmission null lens testing detection scheme can significantly improve the processing accuracy and efficiency of off-axis convex aspheric mirror.
作者
彭利荣
程强
曾雪锋
周晓勤
Peng Lirong;Cheng Qiang;Zeng Xuefeng;Zhou Xiaoqin(School of Mechanical and Aerospace Engineering,Jilin University,Changchun 130025,China;Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China)
出处
《红外与激光工程》
EI
CSCD
北大核心
2022年第9期33-39,共7页
Infrared and Laser Engineering
基金
国家自然科学基金(12003034,11903035,12103054,61805243)
吉林省重点研发计划项目(20200401065 GX)。
关键词
离轴凸非球面
气囊抛光
沥青平滑
零位补偿
畸变矫正
off-axis convex aspheric
bonnet polishing
pitch smoothing
null lens testing
distortion correction
