摘要
压电微机电系统(MEMS)为各种高性能滤波器、振荡器和传感器等提供了一个多功能平台。氮化铝(AlN)MEMS轮廓模谐振器(CMR)具有工作频率跨度大,品质因数高,体积小及能在单个芯片上集成多频器件且与集成电路(IC)技术兼容等优点,具有较好的应用前景。该文对AlN MEMS CMR的原理与典型结构、制备工艺及应用进行了综合性阐述,并分析了CMR技术未来的发展方向。
The piezoelectric microelectromechanical system(MEMS)provides a versatile platform for various high-performance filters,oscillators and sensors,etc..The aluminum nitride(AlN)MEMS contour mode resonator(CMR)has the advantages of large operating frequency span,high quality factor,small size,ability to integrate multi-frequency devices on a single chip and compatible with integrated circuit(IC)technology,etc.,and has good prospects for application.In this paper,the principle,typical structure,fabrication process and applications of AlN MEMS CMR are comprehensively overviewed,and the future developments of CMR technology are analyzed.
作者
俞燕
王璐烽
丁芩华
何杰
YU Yan;WANG Lufeng;DING Qinhua;HE Jie(Chongqing Industry Polytechnic College,Chongqing 401120,China;Suzhou SINOMA Design and Research Institute of Non-metallic Minerals Industy Co.,Ltd.,Suzhou 215004,China;The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China)
出处
《压电与声光》
CAS
北大核心
2022年第4期667-672,共6页
Piezoelectrics & Acoustooptics
关键词
压电微机电系统
氮化铝
轮廓模式谐振器
滤波器
振荡器
射频前端模块
piezoelectric microelectromechanical system(MEMS)
AlN
contour mode resonator(CMR)
filter
oscillator
RF front-end module
