摘要
With the progress in nanotechnology,the importance of nanodimensional standards is increasing.Realizing nanodimensional standards requires multiple types of high-precision microscopy techniques.The National Metrology Institute of Japan(NMIJ),one of the research domains in the National Institute of Advanced Industrial Science and Technology(AIST),is developing nanodimensional standards using atomic force,transmission electron,and scanning electron microscopes.The current status of nanodimensional standards in NMIJ is introduced herein.
基金
supported by the New Energy and Industrial Technology Development Organization(NEDO)(Project code P09002),JSPS KAKENHI Grant Number JP16K18119
the Japan Science and Technology Agency,JSPS KAKENHI Grant Number 20K04511
partly related to the studies conducted by the Consortium for Measurement Solutions for Industrial Use of Nanomaterials(COMS-NANO)in Japan.
