摘要
The presence of polarization noise generated by the waveguide resonator limits the performance of a resonant integrated optical gyroscope(RIOG).Using silicon nitride(Si_(3)N_(4))to fabricate a waveguide with an ultralowaspect-ratio can result in a resonator that only supports light transmission in a single-polarization state,suppressing polarization noise.We successfully fabricated a Si_(3)N_(4)resonator with a bending radius of 17.5 mm,a finesse(F)of 150,a quality factor(Q)of 1.54×10^(7),and a propagation loss of 1.2 d B/m.The Si_(3)N_(4)resonator was used to construct a double closed-loop RIOG that showed long-term bias stability(3600 s)of 13.2°/h at room temperature,14.8°/h at 40℃,21.2°/h at 50℃,and 23.6°/h at 60℃.We believe this to be the best performance reported to date for a Si_(3)N_(4)resonator-based RIOG.This advancement paves the way for the wider application of RIOGs.
基金
National Natural Science Foundation of China(61973019)。
