摘要
针对矢量网络分析仪(VNA)及其测试连接系统校准的宽频带、低功耗、易操作的需求,设计了一款适用于L~Ka波段的可调微机电系统(MEMS)SOLT校准件.该结构校准件以串联、并联式MEMS开关为基础,首先设计出一款串并联混合式MEMS开关,并将负载电阻与MEMS开关进行集成,结合校准件的SOLT原理,利用该开关对信号的选通功能实现短路、开路、负载和直通4种校准状态.该结构的校准件弥补了传统校准件操作复杂、人为误差较大的不足,具有体积小、精度高、易于操作的特点.利用HFSS仿真软件对器件性能进行优化仿真,在L~Ka波段范围内,器件在直通、开路及短路状态下的损耗分别优于1.89 dB,1.8 dB及0.33 dB,阻抗稳定在50.5Ω.
Aiming at the requirements of wide frequency band,low power consumption and easy operation for the calibration of vector network analyzer(VNA)and its test connection system,an adjustable micro-electro-mechanical system(MEMS)SOLT calibration part for L~Ka band was designed.The structural calibration component was based on series and parallel MEMS switches.First,a series-parallel hybrid MEMS switch was designed,and the load resistance was integrated with the MEMS switch.Combined with the SOLT principle of the calibration component,the switch was used to select the signal.The pass-through function can realize four calibration states of short-circuit,open-circuit,load and pass-through.The calibration piece of the structure makes up for the shortcomings of the traditional calibration piece with complicated operation and large human error,and has the characteristics of small size,high precision and easy operation.Using HFSS simulation software to optimize the performance of the device,in the L~Ka band range,the loss of the device in the straight-through,open-circuit and short-circuit states is better than 1.89 dB,1.8 dB and 0.33 dB,respectively,and the impedance is stable at 50.5Ω.
作者
张世义
曹钎龙
吴倩楠
李孟委
ZHANG Shiyi;CAO Qianlong;WU Qiannan;LI Mengwei(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Academy for Advanced Interdisciplinary Research,North University of China,Taiyuan 030051,China;Center for Microsystem Intergration,North University of China,Taiyuan 030051,China;School of Science,North University of China,Taiyuan 030051,China)
出处
《中北大学学报（自然科学版）》
CAS
2022年第5期467-473,共7页
Journal of North University of China(Natural Science Edition)
基金
装备发展部新品项目(2019**0011)。
