摘要
设计对比分析实验并搭建测试系统,获得商品化微机械陀螺仪零偏稳定性对恒温(-40、25、60℃)和温度循环(-40~60℃)载荷的响应规律。恒温载荷下,石英基微机械陀螺仪零偏稳定性计算值在40(°)/h以下,硅基微机械陀螺仪零偏稳定性计算值约在150~670(°)/h的大范围之内。硅基陀螺仪的零偏稳定性计算值与温度基本呈正相关趋势且线性度较好,石英基陀螺仪与之相反。零偏稳定性值在温度循环交变的温度载荷下比在恒温载荷下大几十倍,结构设计和封装工艺等方面得到较好优化的陀螺仪可以有效避免这种负面影响。该研究为微机械陀螺仪零偏稳定性优化提供了对比测试数据和优化方向建议。
A comparative analysis experiment was designed and a test system was built to obtain the response law of zero bias stability of commercial MEMS gyroscope to constant temperature(-40℃,25℃,60℃)and temperature cycle(-40~60℃).Under the constant temperature lo ad,the calculated value of zero bias stability of quartz-based MEMS gyroscope was less than 40(°)/h,and the calculated value of zero bias stability of silicon-based MEMS gyroscope was about 150~670(°)/h.The calculated value of zero bias stability of silicon-based MEMS gyroscope was basically positively correlated with temperature,and the linearity was good,while that of quartz-based MEMS gyroscope was opposite.The zero-bias stability value of the gyroscope was dozens of times larger under alternating temperature load than that under the constant temperature load,but the gyroscope with better structural design and packaging technology can effectively avoid this negative impact.This study provides comparative test data and optimization direction suggestions for the optimization of zero bias stability of MEMS gyroscope.
作者
杜晓辉
刘帅
朱敏杰
刘丹
孙克
王凌云
占瞻
路文一
DU Xiao-hui;LIU Shuai;ZHU Min-jie;LIU Dan;SUN Ke;WANG Ling-yun;ZHAN Zhan;LU Wen-yi(Instrumentation Technology and Economy Institute,Beijing 100055,China;Shenyang Academy of InstrumentationScience Co.,Ltd.,Shenyang 110043,China;Xiamen University,Xiamen 361005,China;Ruisheng Kaitai Technology(Wuhan)Co.,Ltd.,Wuhan 430000,China;Beijing Institute of Telemetry Technology,Beijing 100076,China)
出处
《仪表技术与传感器》
CSCD
北大核心
2022年第6期12-17,22,共7页
Instrument Technique and Sensor
基金
国家重点研发计划项目(2020YFB2010800)
国家重点研发计划项目(2018YFF01010200)
国家自然科学基金项目(62004079)。
关键词
微机械陀螺仪
零偏稳定性
温度响应
对比测试
MEMS gyroscope
zero-bias stability
temperature response
comparative test
