摘要
采用磁控溅射沉积方法,改变Si靶功率制备不同Si含量的CrSiN涂层。通过X射线能谱仪、X射线衍射仪、X射线光电子能谱分析仪、扫描电镜分析涂层的化学成分、晶体结构和微观形貌,使用纳米划痕仪和摩擦磨损试验仪测试涂层的硬度、结合力和摩擦磨损行为。结果表明:随着Si靶功率的增加,CrSiN涂层中Si含量增加,涂层由疏松的三角锥结构转变为致密的CrN纳米晶粒和Si_(3)N_(4)非晶复合结构,涂层硬度、结合力和摩擦系数均呈现先增加后减小的趋势,当Si靶功率为60 W时,涂层具有最佳的摩擦磨损性能,涂层硬度、结合力和摩擦系数分别为23.7 GPa、29.4 N和0.29。
The CrSiN coating with different Si content was prepared through controlling Si target power using magnetron sputtering method.By means of X-ray energy dispersion spectroscopy,X-ray diffraction and scanning electron microscopy,the chemical component,crystal structure and microstructural of CrSiN coated samples was studied.The hardness,adhesion strength and frictional wear behavior of the coated CrSiN samples were tested by nano-scratch tester,friction and wear testing systems.The results showed that:with the increasing Si target power,the Si content of CrSiN coating increased and the surface microstructure of coating changed from loose triangular grains to smooth and compact composite structure consisting of CrN crystal and Si_(3)N_(4) amorphous.The hardness,adhesion strength and frictional coefficient of CrSiN coating firstly increased and then decreased with the increasing Si target power.The CrSiN coating with Si target power of 60 W has the best wear resistance,and its hardness,adhesion strength and frictional coefficient are about 23.7 GPa,29.4 N 0.29,respectively.
作者
付保英
FU Baoying(Department of Mechanical and Electrical Engineering,Hebi College of Vocation and Technology,Hebi 458030,China)
出处
《电镀与精饰》
CAS
北大核心
2022年第7期36-41,共6页
Plating & Finishing
