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皮秒激光旋切制孔工艺研究 被引量:3

Study on Technology of Picosecond Laser Making Micro-Hole with Helical Drilling
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摘要 为探究金属材料微孔的高质量成型工艺,采用皮秒激光旋切加工的方式在金属材料表面上开展微孔成型的实验研究。通过控制旋转光学系统光路中楔形棱镜的偏转和反射镜的平移来实现对微孔形状(尺寸和锥度)的控制。以1 mm厚的304不锈钢为实验对象,主要研究了激光脉冲能量、离焦量、重复频率以及激光旋转速度等实验参数对微孔成型质量的影响。实验结果表明:激光脉冲能量是微孔成型质量的关键因素;离焦量在一定程度上能改变微孔的锥度;激光的重复频率和旋转速度决定微孔的热影响和重铸层厚度。当激光脉冲能量为141μJ、重复频率为66.67 kHz时,取离焦量为+0.1 mm、激光的旋转速度为8000 r/min,制备出了孔径范围在100~300μm之间、锥度均可控的高质量微孔。 In order to explore the high-quality forming process of micro-holes,the picosecond laser combined with helical drilling technology was used to carry out the basic experiments of micro-hole forming.The shape(taper and size) of the micro-hole can be controlled by changing the deflection angle and translation of the wedge prism in the optical path of the rotating optical system.Taking 1-mm 304 stainless steel as an example,the influence of processing parameters such as laser pulse energy,defocusing amount,repetition frequency and laser helical drilling speed on the quality of micro-hole processing was studied.According to the experimental results,laser pulse energy is the key factor of micro-hole forming quality,defocusing amount can change the taper of the micro-hole to a certain extent,and the repetition frequency and rotation speed of the laser determine the thermal influence of the micro-hole and the thickness of the recasting layer.While laser pulse energy is 141 μJ,repetition frequency is 66.67 kHz,defocusing amount is +0.1 mm,and laser helical drilling speed is 8000 r/min,the high-quality micro-holes with pore diameters ranging from 100 to 300 μm and controllable tapers can be obtained.
作者 刘晓东 陈亮 王曦照 熊政军 Liu Xiaodong;Chen Liang;Wang Xizhao;Xiong Zhengjun(Institute of Laser and Intelligent Manufacturing,South-Central University for Nationalities,Wuhan,Hubei 430074,China;College of Electronic and Information Engineering,South-Central University for Nationalities,Wuhan,Hubei 430074,China)
出处 《激光与光电子学进展》 CSCD 北大核心 2022年第7期192-200,共9页 Laser & Optoelectronics Progress
基金 中南民族大学中央高校基本科研业务费专项资金项目(CZZ19007,CZQ21029) 武汉光电国家研究中心开放基金(2021WNLOKF017) 浙江省自然科学基金(LQ20E050014)。
关键词 激光加工 皮秒激光 旋切制孔 不锈钢 微孔 laser processing picosecond laser helical drilling stainless steel micro-hole
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