摘要
为了提高磁控溅射装置面对不同工艺需求的适应能力,设计了一种基于西门子PLC以及LABVIEW的控制系统。该系统中不固化具体的工艺流程而是提供工艺流程编辑接口以及对自定义工艺数据进行解析和执行的功能,实现工艺的可重构。本文在实际需求的基础上完成了系统的硬件架构、软件编程以及人机交互界面的设计;通过实践验证了工艺可重构对提高设备的工艺适应性有较大的帮助。
An automatic control system based on Siemens PLC and LABVIEW was designed to improve the adaptability of magnetron sputtering devices to different process requirements.The system does not solidify the specific process flow but provides the process flow editing interface and the function of parsing and executing the userdefined process data,so as to realize the reconfiguration of the process.This paper completes the design of the system’s hardware architecture,software programming and HMI based on actual needs.It has been verified through practice that process reconfiguration is of great help in improving the process adaptability of equipment.
作者
吴建军
刘荒
李春梅
WU Jianjun;LIU Huang;LI Chunmei(College of Physics Science and Technology,Shenyang Normal University,Shenyang 110034,China;Shenyang Academy of Instrumentation Science Co.,Ltd.,Shenyang 110043,China)
出处
《真空科学与技术学报》
CAS
CSCD
北大核心
2022年第5期404-409,共6页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金面上项目(11674233)。
