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宽谱段Czerny-Turner光谱仪设计 被引量:3

Design of Czerny-Turner spectrometer with wide band
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摘要 为满足宽波段高光谱Czerny-Turner结构光谱仪的要求,基于像差理论,一方面通过光栅产生的像散补偿球面反射镜的像散,另一方面通过柱面镜引入相反像散补偿剩余像散,达到全波段消像散的要求,从而提高Czerny-Turner结构光谱仪成像系统的分辨率。首先理论推导出光栅和柱面镜补偿像散的基础公式,并基于此分别设计出波段为900~1700 nm和1700~2500 nm全波段消像散的Czerny-Turner光谱仪成像系统,随后通过前置光路将两部分组合,从而实现波段范围在900~2500 nm的消像散Czerny-Turner结构光谱仪成像系统。此光谱仪系统全波段分辨率小于10 nm,物方数值孔径0.07,全波段点列图均方根半径小于4μm。ZEMAX的优化分析表明,该光谱仪在全波段范围内不仅达到消像散要求,而且具有较好的成像质量。 In order to meet the requirements of wide-band hyperspectral Czerny-Turner spectrometer,based on the aberration theory,on the one hand,the astigmatism generated by the grating is used to compensate the astigmatism of the spherical mirror,and on the other hand,the opposite astigmatism is introduced through cylindrical mirror to compensate for the residual astigmatism,so as to achieve the full range elimination of astigmatism,and at last to improve the resolution of the Czerny-Turner structure spectrometer imaging system.Firstly,the basic formulas of grating and cylindrical mirror to compensate for astigmatism is deduced,and then based on this,the Czerny-Turner spectrometer imaging system with full-band astigmatism in the band of 900-1700 nm and 1700-2500 nm are designed respectively.Finally,the two parts are combined through the front optical path,thus realize the astigmatism Czerny-Turner structure spectrometer imaging system in the full range of 900-2500 nm.The full-band resolution of the spectrometer is less than 10 nm,the object-side numerical aperture is 0.07,and the full-band root mean square radius is less than 4μm.The optimization analysis of ZEMAX shows that the designed spectrometer not only meets the astigmatism elimination requirements in the whole band,but also has good imaging quality.
作者 李世文 郑小兵 翟文超 LI Shiwen;ZHENG Xiaobing;ZHAI Wenchao(School of Environmental Science and Optoelectronic Technology,University of Science and Technology of China,Hefei 230026,China;Key Laboratory of Optical Calibration and Characterization,Anhui Institute of Optical and Fine Mechanics,HFIPS,Chinese Academy of Sciences,Hefei 230031,China)
出处 《量子电子学报》 CAS CSCD 北大核心 2022年第3期293-306,共14页 Chinese Journal of Quantum Electronics
基金 国家自然科学基金,41805019 国家重点研发计划,2018YFB0504602。
关键词 光学工程 Czerny-Turner结构 消像散 柱面透镜 光谱仪 optical engineering Czerny-Turner structure astigmatism cylindrical lens spectrometer
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