摘要
单晶金刚石是微铣刀的理想刀具材料,但其硬度较高,且微铣刀尺寸较小,传统刀具制造方法难以加工。因此,对基于飞秒激光的单晶金刚石微铣刀制造技术进行了研究。首先计算了单晶金刚石的飞秒激光烧蚀阈值,并分析其材料去除机理。其次利用微槽加工实验进行了工艺参数的优选,并使用最佳参数制备出了高质量的单晶金刚石微铣刀,其前、后刀面表面粗糙度S_(a)分别为150 nm和176 nm,主切削刃刃口钝圆半径达到2.142μm。微铣削实验结果表明,飞秒激光制造的高锋利度单晶金刚石微铣刀的切削性能较好,且切削刃不易失效。
Single crystal diamond is regarded as the excellent materials to prepare micro-milling tools.However,traditional mechanical methods are difficult to process diamond micro-milling tools,due to extraordinary high hardness of diamond and the small size of micro-milling tools.Therefore,the femtosecond laser technique was adopted to study the manufacture of diamond micro-milling tools.Firstly,the ablation threshold of the femtosecond laser was calculated during processing single crystal diamond,and then the material removal mechanism was analyzed.Secondly,the processing parameters were optimized according to grooving experiments.High-quality micro-milling tools of single crystal diamond were manufactured with the optimal parameters.The surface roughness S a of the rake and flank faces reached 150 nm and 176 nm,respectively.And,the roundness of the main cutting edge was 2.142μm.Finally,milling testing confirmed high cutting performance and less tool wear of the diamond micro-milling tools with high sharpness.
作者
陈俊云
刘德辉
张圣康
靳田野
赵智胜
CHEN Junyun;LIU Dehui;ZHANG Shengkang;JIN Tianye;ZHAO Zhisheng(School of Mechanical Engineering,Yanshan University,Qinhuangdao,Hebei 066004,China;State Key Laboratory of Metastable Materials Science and Technology,Yanshan University,Qinhuangdao,Hebei 066004,China;School of Vehicles and Energy,Yanshan University,Qinhuangdao,Hebei 066004,China)
出处
《燕山大学学报》
CAS
北大核心
2022年第3期200-207,共8页
Journal of Yanshan University
基金
国家重点研发计划资助项目(2018YFA0703400)
国家自然科学基金资助项目(51775482)。
关键词
单晶金刚石
飞秒激光
微刀具
微铣削
single crystal diamond
femtosecond laser
micro tool
micro milling
