摘要
针对红外焦平面探测器在新型飞秒激光加工方式上的焦点精确控制需求,建立一套合理高效的飞秒激光快速响应测高随动控制系统,在保证飞秒激光稳定测高、精准控制的基础之上,对其中两个关键点进行深入研究。利用测高仪测量与中值滤波法对测量数据进行优化拟合,降低了曲线失真的程度;通过控制器位置触发方式与PI控制算法优化了压电陶瓷(PZT)的随动精度。实验结果表明,此系统能够获得良好的效果:针对不同尺寸晶圆,可以获得当以800 mm/s速度加工时,整体随动方差为0.6μm,最大误差为1.1μm;当以速度1000 mm/s加工时,整体随动方差为0.9μm,最大误差为1.4μm。本方法可以极大地提高飞秒激光高速加工时的焦点控制精度,从而保证红外焦平面探测器划片边缘质量,增加产品良率,降低成本。
A reasonable and efficient femtosecond laser fast response confocal altimetry cascade control processing system is established for the precision focus control of infrared focal plane detector in the femtosecond laser scratching techniques.On the basis of ensuring the stable height measurement and accurate control of the femtosecond laser,there are also two key points need to be deeply studied.The distortion of the curve has been reduced by using altimeter and median filter after optimum fitting.The following precision of piezoelectric ceramics is optimized by the single-axis position-based triggering and PI control.The experimental results show that the system can achieve good performance.For different sizes of wafers,the overall follow-up variance is 0.6μm when processed at 800 mm/s speed,maximum error 1.1μm;when processing at a speed of 1000 mm/s,the overall follow-up variance is 0.9μm,maximum error 1.4μm.This method can effectively improve the precision of focus control in high speed femtosecond laser machining,so as to ensure the edge quality of infrared focal plane array(IRFPA)detector,and to increase product yield and reduce cost.
作者
盛渤轩
侯煜
张帆
张昆鹏
张喆
张紫辰
SHENG Bo-xuan;HOU Yu;ZHANG Fan;ZHANG Kun-peng;ZHANG Zhe;ZHANG Zi-chen(Beijing Information Science & Technology University,Beijing 100192,China;Institute of Microelectronics(IME) of the Chinese Academy of Sciences,Beijing 100029,China)
出处
《激光与红外》
CAS
CSCD
北大核心
2022年第5期641-645,共5页
Laser & Infrared
基金
北京市自然科学基金项目资助。
关键词
外焦平面探测器划片
飞秒激光加工
测高随动控制
wafer scratching of infrared focal plane array detector(IRFPA)
femtosecond laser processing
confocal altimetry cascade control
