摘要
为提高单晶SiC研磨加工质量和加工效率,制备固相芬顿反应研磨丸片,研究固相催化剂Fe_(3)O_(4)特性(粒径和质量分数)对研磨丸片的硬度、抗弯强度、气孔率、催化性能及其对单晶SiC研磨加工性能的影响。结果表明:随着Fe_(3)O_(4)粒径的增大,丸片的硬度和抗弯强度减小、气孔率增大、催化性能减弱,材料去除率M_(MRR)从43.12 nm/min降到36.82 nm/min,表面粗糙度R_(a)从1.06 nm增大到3.72 nm。随着Fe_(3)O_(4)质量分数的增大,丸片的硬度和抗弯强度减小、气孔率增大、催化性能增强,M_(MRR)从40.14 nm/min降到33.51 nm/min,表面粗糙度R_(a)先减小后增大,分别为3.25 nm、1.75 nm和1.88 nm。
To improve the lapping quality and processing efficiency of single-crystal SiC,solid-state Fenton reaction lapping pellets were prepared.Effects of characteristics of Fe_(3)O_(4)(particle size and mass fraction)solid-phase catalyst on hardness,flexural strength,porosity,catalytic performance,and lapping performance of single-crystal SiC were studied.The results show that with the increase of Fe_(3)O_(4)particle size,the hardness and flexural strength decrease,porosity in-creases,catalytic performance decreases,the material removal rate M_(MRR)decreases from 43.12 nm/min to 36.82 nm/min,and the surface roughness R_(a)increases from 1.06 nm to 3.72 nm.As the Fe_(3)O_(4)mass fraction increases,the hardness and flexural strength of the lapping pellets decrease,and the porosity and catalytic performance increase.The M_(MRR)de-creases from 40.14 nm/min to 33.51 nm/min,the surface roughness R_(a)is 3.25 nm,1.75 nm and 1.88 nm,respectively.
作者
路家斌
曹纪阳
邓家云
阎秋生
胡达
LU Jiabin;CAO Jiyang;DENG Jiayun;YAN Qiusheng;HU Da(School of Mechanical and Engineering,Guangdong University of Technology,Guangzhou 510006,China)
出处
《金刚石与磨料磨具工程》
CAS
北大核心
2022年第2期223-232,共10页
Diamond & Abrasives Engineering
