摘要
磁流变抛光能够高效去除光学元件表面的低频误差,但同时也引入了中频误差,而中频误差的存在对光学系统的性能造成了严重影响,必须对其进行有效控制。对常用的光栅轨迹和螺旋轨迹进行了研究,发现规则的抛光轨迹导致卷积过程与实际去除过程不一致,会引入对称的迭代误差,而迭代误差是中频误差恶化的重要因素。基于对光栅轨迹和螺旋轨迹的研究,提出了一种变距螺旋矩阵轨迹优化方法,以降低光学元件中频误差。该轨迹通过打乱螺旋矩阵轨迹的螺距保留了光栅轨迹和螺旋轨迹简单易行的优点,同时也改变了轨迹线间的随机性。通过对加工前后的面形进行功率谱分析,验证了该轨迹能够有效降低其表面的中频误差,较光栅线和螺旋线中频收敛效率综合提高了26.59%。
Magnetorheological polishing can efficiently remove low-frequency errors on the surface of optical elements, but it also introduces intermediate-frequency errors. The existence of intermediate-frequency errors has a serious impact on the performance of the optical system, which must be effectively controlled. The commonly used grating trajectories and spiral trajectories were studied. It was found that the regular polishing trajectory caused the convolution process to be inconsistent with the actual removal process, which would introduce symmetrical iterative errors. The iterative error is an important factor in the deterioration of the intermediate frequency error. Based on the research of grating trajectory and spiral trajectory, a trajectory optimization method for variable pitch spiral matrix trajectory was proposed to reduce the intermediate frequency error of optical components. The trajectory retained the advantages of simplicity and ease of the grating trajectory and the spiral trajectory by disrupting the pitch of the spiral matrix trajectory, and also changed the randomness between the trajectory lines. Through the power spectrum analysis of the surface shape before and after processing, it was verified that the trajectory can effectively reduce the intermediate frequency error of the surface, and the intermediate frequency convergence efficiency of the grating line and the spiral line is comprehensively improved by 26.59%.
作者
杨航
陈英
黄文
韩明
张星兴
贾阳
李彬
蒋蓉
Yang Hang;Chen Ying;Huang Wen;Han Ming;Zhang Xingxing;Jia Yang;Li Bin;Jiang Rong(School of Engineering,Zunyi Normal University,Zunyi 563006,China;Institute of Mechanical Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621900,China;Wuhan National Laboratory of Optoelectronics,Huazhong Institute of Optoelectronics Technology,Wuhan 430073,China)
出处
《红外与激光工程》
EI
CSCD
北大核心
2022年第3期322-328,共7页
Infrared and Laser Engineering
基金
国家科技重大专项(2017ZX04022001)
遵义市科技局科技研发项目(遵市科合HZ字[2020]21号)
贵州省基础研究计划(黔科合基础-ZK[2021]一般272)。
关键词
磁流变抛光
中频误差
功率谱密度
螺旋矩阵轨迹
轨迹优化
magnetorheological polishing
intermediate frequency error
power spectral density
spiral matrix trajectory
trajectory optimization
