摘要
超快激光在金属、电介质和半导体表面制备周期性纳米结构可以有效地改变材料的物化性质,如光学、电学、亲疏水性等。周期性纳米条纹取向通常依赖于激光的偏振,因此利用径向偏振的飞秒激光能够制备不同弯曲度的周期性纳米条纹。通过分析柱透镜聚焦的径向偏振光光场具有随空间变化的偏振方向,实验上获得了柱透镜聚焦的径向光场在不同位置诱导周期性纳米结构的形貌特征。随后利用5 mm的狭缝分离矢量光场中的各向异性偏振态来获得不同弯曲角度条纹的大面积制备。结果表明,利用这种方法在ZnO表面获得了弯曲可控的深亚波长(190~380 nm)周期条纹结构,并且成功制备了弯曲角度从0°到165°的大面积周期性纳米条纹。
The periodic surface structure induced by femtosecond laser can effectively change the physical and chemical properties of the material surface,such as optical,electrical,hydrophilic and hydrophobic properties.The orientation of periodic nanostripes usually depends on the polarization of the laser,so radially polarized laser can be used to fabricate the periodic nanostripes with different curvature.The radially polarized laser focused by the cylindrical lens present a position-dependent polarization distribution.The morphological characteristics of periodic nanostripes induced by radially polarized laser at different positions are demonstrated in experiments.Then the anisotropic polarization state in the vector field is separated by a 5 mm slit,so as to fabricate the large-area periodic nanostripes with bending angles.The results show curvature controllable deep sub-wavelength(190~380 nm)surface periodic stripes on ZnO surface are obtained by this method and the large area of periodic nanostripes with bending angles from 0°to 165°are fabricated successfully.
作者
罗丞
李奇松
王康
刘一
LUO Cheng;LI Qisong;WANG Kang;LIU Yi(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)
出处
《光学仪器》
2022年第2期59-64,共6页
Optical Instruments
基金
国家自然科学基金(61905263,12034013)
上海市青年科技杨帆计划(18YF1426300)
上海市教委创新计划项目(2017-01-07-00-07-E00007)。
关键词
超快激光加工
弯曲周期性纳米条纹
径向偏振光
ZNO晶体
ultrafast laser fabrication
curved periodic nanostripes
radially polarized laser
crystalline ZnO
