摘要
薄膜封装是有机电致发光器件柔性化亟需解决的关键技术难题。用NEA121树脂与Al_(2)O_(3)作为薄膜封装的有机膜与无机膜封装,封装薄膜的水氧阻隔性能通过钙膜测试。实验结果表明,3层堆叠Al_(2)O_(3)/NEA121封装后的水汽透过率(Water Vapor Transmission Rate,WVTR)达到2.1×10^(-4) g/(m^(2)·d),封装薄膜的失效原因是水汽通过封装薄膜缺陷点渗透,不断腐蚀钙膜导致封装失效,而采用无机/有机堆叠封装的方法使薄膜的封装效果得到了改善。
Thin-film encapsulation is a key technical problem that needs to be solved urgently in the flexibility of organic electroluminescent devices.NEA121 resin and Al_(2)O_(3) are used as thin-film encapsulated organic and inorganic films.The water and oxygen barrier properties of the encapsulated film are obtained through calcium film testing.The experimental results show that the water vapor transmission rate(WVTR)after the three-layer stack Al_(2)O_(3)/NEA121 package reaches 2.1×10^(-4) g/(m^(2)·d),and the failure of the package film is caused by the penetration of water vapor through the defect points of the package film and continuous corrosion of calcium membrane results in failure of the package,and inorganic/organic stacked package encapsulation thin film effect is improved.
作者
彭荣
杨振波
王珺
PENG Rong;YANG Zhenbo;WANG Jun(Electrical Engineering and Automation Major,School of Information Engineering,Guangzhou Vocational and Technical University of Science and Technology,Guangzhou 510000,China)
出处
《电子与封装》
2022年第4期16-20,共5页
Electronics & Packaging
关键词
薄膜封装
无机/有机叠层薄膜
水汽透过率
原子层沉积
旋涂
film encapsulation
inorganic/organic laminated film
water vapor transmission rate
atomic layer deposition
spin coating
