摘要
为了研究紫外皮秒激光在均热板基板表面刻蚀微沟槽后,不同激光工艺参数对微沟槽表面疏水性的影响规律,采用Cassie-Baxter模型进行了理论分析,并利用单因素实验法,改变激光扫描速率、激光扫描间距、光斑横向重叠次数进行实验验证。结果表明,降低固-液区域面积占比、宽度或缩短沟槽间距,均可以提升微沟槽表面的疏水性能;造成微沟槽表面疏水的主要原因是其内部的微纳结构以及加工时吸附的疏水性化学基团;当激光扫描速率为125mm/s、激光扫描间距为200μm、光斑横向重叠次数为2次时,紫外皮秒激光刻蚀出的微沟槽表面的疏水性最强。该研究为增强均热板冷凝端的疏水性能、提升其整体循环效率提供了参考。
To study the influence of different laser processing parameters on the surface hydrophobicity of the micro grooves etched by an ultraviolet picosecond laser on the surface of a soaking plate,a Cassie-Baxter model were constructed.By using the method of single factor experiment,the change rate of laser scanning,laser scanning spacing,speckle transverse overlapping times was experimentally verified,respectively.The results show that the hydrophobicity of the surface of micro-grooves can be improved by reducing the ratio of solid-liquid area and the width of the grooves or shortening the distance between the grooves.The main reasons for the surface hydrophobicity of micro-grooves are the internal micro-nano structure and the adsorbed hydrophobic chemical groups during processing.When the laser scanning rate is 125mm/s,the laser scanning interval is 200μm,and the spots overlap twice,the surface of the micro-grooves etched by ultraviolet picosecond laser has the strongest hydrophobicity.This study provides a reference for enhancing the hydrophobic performance of the condensing end of the soaking plate and improving its over all circulation efficiency.
作者
李元可
魏昕
汪永超
赵忠伟
李亮
张亮
LI Yuanke;WEI Xin;WANG Yongchao;ZHAO Zhongwei;LI Liang;ZHANG Liang(School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China)
出处
《激光技术》
CAS
CSCD
北大核心
2022年第3期301-306,共6页
Laser Technology
关键词
激光技术
激光刻蚀
皮秒激光
微沟槽
疏水性
laser technique
laser etching
picosecond laser
microgroove
hydrophobic
