摘要
针对目前微观三维表面形貌测量技术中存在检测效率和测量范围较小的问题,提出一种基于双线阵相机的线扫描差动共聚焦三维形貌测量方法。采用线扫描光源,利用线扫描拼接算法,分别合成焦前和焦后图像;再利用差动算法获得样本位于测量区域的差动图像,结合预先刻度的轴向响应曲线,完成样本的三维形貌还原,实现大范围高效测量。实验结果证明:基于双线阵相机的线扫描差动共聚焦三维形貌测量方法在相同时间内测量范围和测量效率分别是白光干涉仪的16.48倍和6.59倍,并且该方法在测量过程中不需要停顿,只需实现一次对焦,就可以对样品进行连续不间断的扫描检测。研究成果为满足智能制造中在线在位、实时高效、大范围测量的检测需求提供依据。
Current microscopic 3D surface topography measurement technology has low detection efficiency and small measurement range.To address these problems,a linear scanning differential confocal 3D morphology measurement method based on dual linear array camera was proposed.The linear scanning light source and linear scanning stitching algorithm were adopted to synthesize pre-focus and post-focus images respectively.The differential image of the sample in the measurement area was obtained by using the differential algorithm.Combined with the pre-calibrated axial response curve,the 3D morphology of the sample was restored to achieve a large range of efficient measurement.The experimental results show that the measurement range and the measurement efficiency of the linear scanning differential confocal threedimensional topography measurement method based on the dual line array camera are 16.48 times and 6.59times of that of the white light interferometer respectively in the same time.Moreover,this method does not require to pause in the measurement process,and it can scan and detect the sample continuously and uninterruptedly only achieving one focus.The research results provide a basis to meet the requirements of online,real-time,efficient and large-range measurement in intelligent manufacturing.
作者
赖东明
孔令华
练国富
易定容
朱星星
LAI Dongming;KONG Linghua;LIAN Guofu;YI Dingrong;ZHU Xingxing(School of Mechanical and Automotive Engineering,Fujian University of Technology,Fuzhou 350108,China;College of Mechanical Engineering and Automation,Huaqiao University,Xiamen 361021,China)
出处
《应用光学》
CAS
CSCD
北大核心
2022年第2期298-303,共6页
Journal of Applied Optics
基金
福建省科技重大专项专题项目(2020HZ03018)。
关键词
轴向测量
差动共聚焦显微测量
线扫描技术
双线阵相机
axial measurement
differential confocal microscopic measurement
line scanning technology
dual linear array camera
