摘要
针对恶劣环境下检测装备应变的需求,设计了一种无线无源的应变传感器,此传感器采用电感电容分离的结构,可以有效延长使用寿命,减少电磁干扰。通过高频结构模拟器(HFSS)仿真对传感器电场进行仿真,验证了其可行性。采用电镀技术制备了传感器,搭建应变测试平台对其进行测试,测试结果表明,该传感器可以检测0~2 500με范围内的应变,传感器谐振频率随应变的增大规律性地向右偏移,应变灵敏度为7.6 Hz/με。由测试结果可知,该无线无源应变传感器可以稳定地进行应变监测且测试结果可靠。
In response to the demand for detecting equipment strain in harsh environments, a wireless passive strain sensor was designed.This sensor adopted a structure with inductance and capacitance separation, which can effectively extend the service life and reduce electromagnetic interference.The electric field of the sensor was simulated by the high-frequency structure simulator(HFSS),and its feasibility was verified.The sensor was prepared by electroplating technology, and a strain test platform was built to test it.The test results show that the sensor can detect strain in the range of 0~2 500 με.The sensor’s resonance frequency shifts to the right regularly with the increase of strain, and the strain sensitivity is 7.6 Hz/με.It can be known from the test result that the wireless passive strain sensor can perform strain monitoring stably and the test result is reliable.
作者
李美朴
谭秋林
LI Mei-pu;TAN Qiu-lin(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)
出处
《仪表技术与传感器》
CSCD
北大核心
2022年第3期29-32,39,共5页
Instrument Technique and Sensor
基金
国家重点研发计划项目(2018YFB2002503)。
关键词
应变传感器
无线无源
LC传感器
电镀技术
有限元分析
聚酰亚胺
strain sensor
wireless passive
LC sensor
electroplating technology
finite element analysis
polyimide
