摘要
传统机械加工易造成石英玻璃等绝缘硬脆材料表面微裂纹损伤和侧壁崩碎过切的现象。电化学放电加工可实现石英玻璃的无损伤加工且加工精度可达到微米级,但难以解决无损伤加工精度和加工效率之间的矛盾。以表面无损伤高效率加工石英玻璃为目标,提出了超声振动辅助机械铣削复合电化学放电加工的新方法,分析了该方法的作用机制;采用高速气动主轴实现了高转速下的脉冲电传导,解决了传统主轴的高速旋转电刷扰动和脉冲电信号导入两方面技术难题。基于高速摄像机研究了在该方法条件下的微观瞬时电解生成气泡/气膜过程,并结合基础实验得到工艺规律,还通过窄槽结构加工验证该方法可有效改善石英玻璃的无损伤加工效率。
Traditional processes of mechanical machining are easy to cause surface micro-crack damage and side-wall overcutting of hard and brittle insulating materials such as quartz glass. Spark assisted chemical engraving(SACE) has the feasibility of non-damage processing of quartz glass,and the processing accuracy can even reach micron level. However,in SACE the contradiction between non-damage processing accuracy and high processing efficiency is difficult to solve. In this paper,a novel hybrid process of ultrasonic vibration assisted mechanical milling and SACE is proposed to efficiently machine quartz glass without surface damage,considering the analyzation of the process mechanism. A pneumatic spindle is used to realize high rotation speed and the conduction of pulsed electricity,which solves the technical problems of brush disturbance and pulsed signal introduction. The process of bubble/film generation from micro instantaneous electrolysis is observed by a high speed camera. The process rules are obtained from basic machining experiments. It is verified that the proposed process can improve the processing efficiency of quartz glass without surface damage.
作者
佟浩
罗雨戈
刘国栋
李勇
NAWAZ Shan Ali
TONG Hao;LUO Yuge;LIU Guodong;LI Yong;NAWAZ Shan Ali(State Key Laboratory of Tribology,Department of Mechanical Engineering,Tsinghua University,Beijing 100084,China)
出处
《电加工与模具》
2022年第S01期54-58,63,共6页
Electromachining & Mould
基金
国家自然科学基金项目(51675302)
摩擦学国家重点实验室自主研究课题(SKLT2019B04)。
关键词
放电辅助化学加工
电化学放电加工
机械铣削
超声振动
石英玻璃
窄槽
spark assisted chemical engraving
electrochemical discharge machining
mechanical milling
ultrasonic vibration
quartz glass
narrow groove
