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相位光栅衍射法测量高灰阶LC-SLM相位调制特性 被引量:1

Phase modulation characteristics measurement of high gray-level LC-SLM by using phase grating diffraction method
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摘要 为测量高灰阶液晶空间光调制器(LC-SLM)整体相位调制特性,引入二维棋盘形相位光栅衍射测量方法。根据傅里叶光学原理,经过理论推导和仿真分析得到零级衍射光强与相位调制量之间的关系。搭建含有参考光束的衍射实验系统,通过适当的光斑图像处理计算出零级衍射相对光强,从而获得相位调制特性曲线,并与干涉测量法实验结果进行对比。实验结果显示两种方法得到的调制曲线高度相似,相关系数达0.996;表明相位光栅衍射法能用于测量LC-SLM整体相位调制,可获得2π相位调制范围内的特性曲线。最后分析衍射法与干涉法的特点与局限,可为实际测量提供有益参考。 The diffraction measuring method with two-dimensional checkerboard phase grating is introduced to measure the whole phase modulation characteristics of high gray-level liquid-crystal spatial light modulator(LC-SLM). According to the Fourier optical principle, the relation between the zero-order diffraction intensity and the phase delay is obtained through theoretical derivation and simulation analysis. The diffraction experimental system with reference beam is built and then the relative intensity of zero-order diffraction is calculated by using appropriate image processing for diffraction pattern. The phase modulation characteristic curveis obtained, and it is compared with the experimental result of interferometric method. The results show that the modulation curves from two methods are highly similar with the correlation coefficient up to 0.996. It is indicated that the phase grating diffraction method can be used to measure the whole phase modulation of LC-SLM and the characteristic curves within the range of 2π phase modulation can be obtained. Finally, the feature and limitation of two methods are analyzed, which can provide the useful reference for practice measurement.
作者 陈佳艺 王建新 白福忠 徐永祥 CHEN Jiayi;WANG Jianxin;BAI Fuzhong;XU Yongxiang(School of Mechanical Engineering,Inner Mongolia University of Technology,Huhhot 010051,China;College of Science,Southwest University of Science and Technology,Mianyang 621010,China;Inner Mongolia Key Laboratory of Special Service Intelligent Robotics,Hohhot 010051,China)
出处 《中国测试》 CAS 北大核心 2022年第3期35-40,共6页 China Measurement & Test
基金 国家自然科学基金(51765054,11902277,62165011) 内蒙古自治区自然科学基金(2020LH06002)。
关键词 液晶空间光调制器(LC-SLM) 相位调制特性 棋盘形相位光栅 衍射测量法 liquid crystal spatial light modulator(LC-SLM) phase modulation characteristics checkerboard phase grating diffraction measurement method
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