摘要
近年,我国集成电路产业快速成长,产业规模有了较大提升,企业成规模化聚集在特色产业园。集成电路生产过程所涉及的化学品种类繁多,产生多种有毒有害气体,运行期持续的废气排放会对区域环境产生影响。做好集成电路项目大气环境影响评价是项目建设环保可行的重要依据,从环评编制类型、工艺废气的产生、废气排放标准、废气治理措施、废气的排放和管理、评价结论6个方面对集成电路制造工业大气环境影响评价进行了阐述,同时对集成电路行业环评工作中应关注的问题进行了探讨,为环境影响评价从业人员和审批人员提供参考。
In recent years,China's integrated circuit industry has grown rapidly,the industrial scale has been greatly improved,and enterprises have gathered in characteristic industrial parks on a large scale.The production process of integrated circuit involves a wide variety of chemicals,producing a variety of toxic and harmful gases.Continuous waste gas emissions during the operation period will have an impact on the regional environment.Atmospheric envi-ronmental impact assessment of integrated circuit projects is an important basis for feasible environmental protection.This paper elaborated integrated circuit manufacturing atmospheric environmental impact assessment from six aspects:environmental assessment preparation type,process exhaust gas generation,exhaust gas emission standards,waste gas treatment measures,exhaust gas emission and management,and evaluation conclusion.At the same time the author discusses concerning problems during environmental impact assessment of in-tegrated circuit industry,so as to provide reference for practitioners and approvers of environ-mental impact assessment.
作者
陶寅
TAO Yin(Shanghai Energy Conservation and Emission Reduction Center Co.,Ltd.)
出处
《上海节能》
2022年第3期309-314,共6页
Shanghai Energy Saving
关键词
集成电路
废气
环境影响评价
环保管理
Integrated Circuit
Waste Gas
Environmental Impact Assessment
Environment Protection Management
