摘要
绝对检验作为一种光学元件高精度检测方法,其中的两平晶绝对检验无法精确测量平移过程中的倾斜误差,导致恢复的面形中二次项出现偏差。液面在位置变化前后能够保持水平,在旋转平移过程中不会产生倾斜误差。推导了平移过程中倾斜误差和恢复面形中离焦项的关系,并通过仿真分析加以验证,当不存在倾斜误差时,残差面PV值小于1nm。在300mm口径立式斐索干涉仪上进行液面旋转平移干涉实验,将所得到结果与传统三面互检法进行对比,面形基本一致,PV值偏差小于1.3nm,RMS值偏差小于0.65nm,证明了液面旋转平移法在干涉测量过程中不会引入倾斜误差。
Absolute inspection is a high-precision inspection method for optical components,in which the absolute inspection of two flat crystals cannot accurately measure the tilt error in the translation process,which leads to deviations in the quadratic term in the restored surface shape.The liquid level can be kept level before and after the position changes,and there will be no tilt error during the rotation and translation process.The relationship between the tilt error in the translation process and the defocus term in the restored surface shape is deduced and verified by simulation analysis.When there is no tilt error,the residual surface PV value is less than 1 nm.The liquid surface rotation and translation interference experiment was carried out on a 300 mm vertical Fizeau interferometer.The results were compared with the traditional three-sided mutual inspection method.The surface shape was basically the same,the deviation of PV value was less than 1.3 nm,and the deviation of RMS value was less than 0.65 nm,it proves that the liquid surface rotation and translation method will not introduce tilt error in the interferometric measurement process.
作者
马海颖
陈磊
王云涛
胡晨辉
黄晨
马致遥
郑东晖
MA Haiying;CHEN Lei;WANG Yuntao;HU Chenhui;HUANG Chen(School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)
出处
《光学技术》
CAS
CSCD
北大核心
2022年第1期21-26,64,共7页
Optical Technique
基金
国家自然科学基金项目(U1731115,62005122)
江苏省自然科学基金青年基金(BK20200458)。
关键词
干涉测量
平面绝对检验
液面旋转平移
倾斜误差
interferometric measurement
plane absolute inspection
liquid level rotation and translation
tilt error
