摘要
针对现有激光化学气相沉积设备在寻找掩膜版缺陷点时存在镜头移动行程长、镜头频繁失焦的问题,采用基于2-opt邻域搜索的蚁群算法来优化设备的修复缺陷点顺序。相对于传统的X/Y轴升序排列,此方法能够有效缩短镜头寻点时间、降低失焦概率。为加快处理大规模缺陷点时的算法速度,提出设置蚁群近邻搜索范围、2-opt固定半径邻域搜索以及设置不检测标记的加速策略来改善2-opt蚁群算法的收敛时间和优化质量。实验证明,改善后的2-opt蚁群算法路径优化率超过92.5%,最快算法时间仅为5.72 s,失焦率仅仅为0.28%,相比基本蚁群算法和基本2-opt蚁群算法,改善后的2-opt蚁群算法在路径优化质量、优化时间以及保证镜头焦距稳定方面更具优势。
To solve the long lens moving distance and lens defocusing when Laser Chemical Vapor Deposition(LCVD)equipment traces defect points in photomask defect repairing,a kind of ant colony optimization(ACO)algorithm mixed with 2-opt neighborhood search was proposed to optimize the sequence of defect coordinates.The method could effectively reduce the points tracing time and lens defocus rate,compared with the traditional ascending sequence of X or Y axis.To enhance the algorithm processing time in the case of large-scale defects,several acceleration tactics were applied in the ACO algorithm mixed with 2-opt neighborhood search,including nearest neighborhood searching tactic in ACO algorithm,fixed radius searching setting and“don’t look bits tactic”in 2-opt algorithm.The experimental results showed that the improved ACO algorithm mixed with 2-opt neighborhood search could reveal over 92.5%improvement than raw AOI distance,with only 5.72 s time consumption and 0.28%defocus rate.The improved algorithm demonstrates better performance in path optimization quality,optimization time and maintaining lens focusing than basic ACO and basic ACO mixed2-opt algorithm.
作者
徐智俊
王亚腾
熊启龙
XU Zhijun;WANG Yateng;XIONG Qilong(Hefei Qingyi Photomask Ltd.,H0H23OO11,CHN;Shenzhen Qingyi Photomask Ltd.,Shenzhen Guangdong,518Q53,CHN)
出处
《光电子技术》
CAS
2021年第4期274-282,共9页
Optoelectronic Technology
