摘要
通过分析全球电子化学品(含氟电子气体、湿电子化学品和光刻胶)生产技术相关专利的申请态势,研究电子化学品生产技术的发展全貌,并分别对含氟电子气体、湿电子化学品和光刻胶技术的成熟度进行分析。重点分析了全球电子化学品领先企业的技术布局,并提出了我国今后的发展建议。
The global technological development of electronic chemicals(fluorinated electronic gases,wet chemicals,photoresist)production technologies was investigated based on trends analysis of related patent applications.Also the technology of producing fluorinated electronic gases,wet chemicals,and photoresist was provided with a technology maturity analysis,respectively.More specifically,the technology portfolios of the world’s leading electronic chemicals companies were analyzed.Some suggestions for China’s future development were put forward.
作者
于宸
顾方
鲁瑛
肖甲宏
白杨
朱文瀚
YU Chen;GU Fang;LU Ying;XIAO Jia-hong;BAI Yang;ZHU Wen-han(China National Chemical Information Center Co.,Ltd.,Beijing 100029,China)
出处
《精细与专用化学品》
CAS
2022年第1期8-11,共4页
Fine and Specialty Chemicals
基金
中国工程科技知识中心建设项目(CKCEST-2021-1-3)。
关键词
电子化学品
含氟电子气体
湿电子化学品
光刻胶
科技发展
electronic chemicals
fluorinated electronic gases
wet chemicals
photoresist
technological development
