摘要
对采用非平衡磁控溅射方法制备的柱状晶MoS_(2)-Ti复合薄膜开展了原子氧(AO)辐照试验.原子氧的平均动能是5 eV,累计辐照通量6.0×10^(22)atoms/cm^(2).原子氧造成薄膜表面出现"绒毯"状形貌,表层的MoS_(2)和内部的低价钛氧化物分别被氧化成硬质的MoO_(3)和TiO_(2),但原子氧对距表层30 nm以下Mo的化学态没有影响.薄膜的初始真空摩擦系数和磨损率分别由辐照前的大约0.018和4.49×10^(-17)m^(3)/(N·m)升高至0.03和5.5×10^(-17)m^(3)/(N·m),磨损机制也发生了由黏着磨损向磨粒磨损的转变.
MoS_(2)-Ti composite film with columnar microstructure was fabricated by unbalanced magnetron sputtering,and was irradiated by an atomic oxygen(AO)beam with 5 eV kinetic energy and total fluence of 6.0×10^(22)atoms/cm^(2).The MoS_(2)-Ti composite film exhibited a“blanket-like”surface morphology after AO irradiation.The MoS_(2)phase on the film surface(within the depth of~30 nm)and titanium suboxides(e.g.TiO_(2)-x,where 0<x<2)inside the film were oxidized by AO into MoO_(3)and TiO_(2),respectively,leaving the MoS_(2)beneath the top 30 nm oxidation layer uninfluenced were oxidized to MoO_(3)and TiO_(2),leaving unchanged chemical state of element Mo in the film.After AO irradiation,initial friction coefficient and wear rate increased from 0.018 to 0.03 and 4.49×10^(-17)m^(3)/(N·m)to 5.5×10^(-17)m^(3)/(N·m),respectively,and its friction mechanism was transformed from adhesion to abrasion.
作者
胡汉军
张凯锋
周晖
刘兴光
郑玉刚
HU Hanjun;ZHANG Kaifeng;ZHOU Hui;LIU Xingguang;ZHENG Yugang(National Key Laboratory of Science and Technology on Vacuμm Technology and Physics,Lanzhou Institute of Physics,CAST,Gansu Lanzhou 730000,China)
出处
《摩擦学学报》
EI
CAS
CSCD
北大核心
2021年第5期627-635,共9页
Tribology
基金
装备预研领域基金项目(61409220205)资助。
