摘要
The reliable operation of flexible display devices poses a significant engineering challenge regarding the metrology of high barriers against water vapor.No reliable results have been reported in the range of 10–6 g∙(m^(2)∙d)1,and there is no standard ultra-barrier for calibration.To detect trace amount of water vapor permeation through an ultra-barrier with extremely high sensitivity and a greatly reduced test period,a predictive instrument was developed by integrating permeation models into high-sensitivity mass spectrometry measurement based on dynamic accumulation,detection,and evacuation of the permeant.Detection reliability was ensured by means of calibration using a standard polymer sample.After calibration,the lower detection limit for water vapor permeation is in the range of 10–7 g∙(m^(2)∙d)1,which satisfies the ultra-barrier requirement.Predictive permeation models were developed and evaluated using experimental data so that the steady-state permeation rate can be forecasted from non-steady-state results,thus enabling effective measurement of ultra-barrier permeation within a significantly shorter test period.
基金
This work was supported by the National Natural Science Foundation of China(51835005 and 51911540476)
the Hubei Provincial Natural Science Foundation of China(2019CFB527)
the Hubei Provincial Natural Science Foundation of China for innovative research groups(2020CFA030)
the Independent Research and Development Fund of Huazhong University of Science and Technology(HUST)(2019kfyXMBZ025)
the State Key Lab of Digital Manufacturing Equipment&Technology(0225100102).
