摘要
A heat transfer study was conducted,in the framework of Computational Fluid Dynamics(CFD),on a Hot-Wire Chemical Vapour Deposition(HWCVD)reactor chamber to determine a safe deposition distance for atomic hydrogen produced by HWCVD.The objective of this study was to show the feasibility of using heat transfer simulations in determining a safe deposition distance for deposition of this kind.All CFD simulations were set-up and solved within the framework of the CFD packages of OpenFOAM namely;snappyHexMesh for mesh generation,buoyantSimpleFoam and rhoSimpleFoam as the solvers and paraView as the post-processing tool.Using a standard set of deposition parameters for the production of atomic hydrogen by HWCVD,plots of the gas temperature in the deposition region were produced.From these plots,we were able to determine a safe deposition distance in the HWCVD reactor to be in the range between 3 and 4 cm from the filament.
