摘要
为了提高单点金刚石车削CaF_(2)衍射光学元件(DOE)的表面质量和衍射效率,首先基于Beckman标量散射理论和有效面积法,建立了表面粗糙度误差和表面轮廓误差对衍射效率影响的数学模型。然后,结合CaF_(2)的车削特性和DOE的结构特点,优化了CaF_(2)DOE的车削模型。同时,给出了不同工艺条件下半圆金刚石刀具的最佳车削位置和最优刀具半径,实现了对CaF_(2)DOE表面粗糙度的控制。最后,在该优化模型的指导下,获得了表面粗糙度为3.4 nm、阴影区域宽度为28.7μm的高表面质量的CaF_(2)DOE,验证了所提优化车削模型的可靠性。所提车削模型对提高包含CaF_(2)DOE折-衍混合光学系统的成像质量具有重要意义。
In order to improve the surface quality and diffraction efficiency of CaF_(2) diffraction optical element(DOE)processed by single point diamond turning,a mathematical model is proposed to reveal the effect of surface roughness error and surface profile error on diffraction efficiency based on Beckman scalar scattering theory and effective area method first.Then,the turning model of CaF_(2) DOE is optimized combining with the turning characteristics of CaF_(2) and the structural characteristics of DOE.At the same time,the optimal turning positions and tool radii of half-round tool under different process conditions are given,which realizes the control of the surface roughness of CaF_(2) DOE.Finally,the high surface quality CaF_(2) DOE with a surface roughness of 3.4 nm and a shadow region width of 28.7μm is obtained with the guidance of the optimized model,which verifies the reliability of the proposed optimized turning model.The proposed optimized turning model has great significance for improving the imaging quality of the refraction-diffraction hybrid optical system containing CaF_(2) DOE.
作者
高翔
李闯
坎金艳
薛常喜
Gao Xiang;Li Chuang;Kan Jinyan;Xue Changxi(School of Opto-Electronic Engineering,Changchun University of Science and Technology,Changchun,Jilin 130022,China;Shanghai Aerospace Control Technology Institute,Shanghai 201109,China)
出处
《光学学报》
EI
CAS
CSCD
北大核心
2021年第22期13-20,共8页
Acta Optica Sinica
基金
吉林省重点科技研发项目(20180201030GX)。
