期刊文献+

G7型铸造多晶硅底部阴影的分析及改善研究

ANALYSIS AND IMPROVEMENT OF BOTTOM SHADOW FORMATION IN CASTED G7 TYPE MULTICRYSTALLINE SILICON
下载PDF
导出
摘要 基于硅液相夹杂的裹入模型计算临界长晶速率,分析G7炉型铸造多晶硅锭底部阴影与长晶速率的关系,并探究不同热场对晶锭底部阴影的影响。设计3种不同长晶速率和2种热场的实验,根据红外探伤(IR)测试阴影图、长晶速率曲线及晶体生长界面等试验数据,对晶锭底部阴影进行深入研究。研究表明,硅锭底部阴影是底部长晶速率过快且对流较弱造成,晶锭底部长晶速率在9.82 mm/h以下,晶锭底部无阴影;底部长晶速率在9.82 mm/h以上,晶锭底部出现阴影。对于大热场G7炉,降低晶锭底部长晶速率或改变热场结构提升晶锭底部温度可消除底部阴影。 The critical crystal growth rate was calculated based on the inclusion model of silicon liquid.The relationship between growth rate and bottom shadow of ingots was analyzed in the G7 furnace,and the effect of different thermal fields at the bottom shadow of ingots was explored.We designed three different crystal growth rate experiments and two thermal fields.Based on the experimental data of infrared detector images(IR images),growth rate curves,seed interface and so on,we studied the bottom shadow of ingots deeply.The results showed that the bottom shadow of the silicon blocks is caused by the fast bottom crystal growth rate and the weak liquid convection.It was found that crystal growth rate at the bottom of ingots is below 9.82 mm/h,there is no shadow at the bottom of ingots.The bottom crystal growth rate is above 9.82 mm/h,the shadow at the bottom of ingots will be found.For the large thermal field G7 furnace,reducing the crystal growth rate at the bottom of the ingot,the bottom shadow will be eliminated,also we can change the thermal field structure to increase the temperature at the bottom of ingots,it can eliminate the bottom shadow.
作者 徐云飞 何亮 雷琦 罗鸿志 周成 毛伟 Xu Yunfei;He Liang;Lei Qi;Luo Hongzhi;Zhou Cheng;Mao Wei(LDK Solar Hi-Tech Co.,Ltd.,Xinyu 338032,China;National Photovoltaics Engineering Technology Research Center,Xinyu 338032,China;Department of Applied Chemistry,Institute of Chemistry and Materials Science,University of Science and Technology of China,Hefei 230026,China)
出处 《太阳能学报》 EI CAS CSCD 北大核心 2021年第11期46-50,共5页 Acta Energiae Solaris Sinica
关键词 光伏 多晶硅 铸造 长晶速率 阴影分析 G7炉 PV poly silicon casted growth rate shadow analysis G7 furnace
  • 相关文献

参考文献3

二级参考文献16

  • 1张雯,王红洁,金志浩,白玉.多孔氮化硅/碳化硅复合材料制备的反应机理分析[J].无机材料学报,2005,20(5):1215-1221. 被引量:8
  • 22006年全球太阳能多晶硅产业研究报:http://data.chinabyte.com/313/3053313[].shtml. 被引量:1
  • 3Favre A, Fuzellier H, Suptil J. An Original Way to Investigate the Siliconizing of Carbon Materials [ J ]. Ceramics International ,2003,29 ( 3 ) :235 - 243. 被引量:1
  • 4SФiland A K,Ovrelid E J, Engh T A, et al. SiC and Si3 N4 Inclusions in Muhicrystalline Silicon Ingots [ J ]. Materials Science in Semiconductor Processing,2004,7 ( 1 - 2 ) : 39 -43. 被引量:1
  • 5Du Guoping, Zhou Lang, Rossetto Pietro, et al. Hard Inclusions and Their Detrimental Effects on the Wire Sawing Process of Muhicrystalline Silicon [ J ]. Solar Energy Materials and Solar Cells ,2007,91 ( 18 ) : 1 743 - 1 748. 被引量:1
  • 6http://www, crct. polymtl.ca/FACT/phase_diagram. php? file = C - Si. jpg&dir = FSlite[ EB/OL]. 被引量:1
  • 7Stephen A.Campbell.微电子制造科学原理与工程技术.第2版[M].曾莹,等译.北京:电子工业出版社,2003:13. 被引量:1
  • 8朱黎辉.再谈太阳能电池用高纯多晶硅质量标准的几点浅见[C].多晶硅材料产业发展及标准化研讨会文集.上海:2007.12. 被引量:1
  • 9R.C.Newman.roe.[J].Phys.Soc,1960,76:993. 被引量:1
  • 10万群 李玉珍 徐宝琨 等.半导体学报,1984,5:360-367. 被引量:1

共引文献27

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部