摘要
针对低频振动信号的高精度测量需求,设计了一种基于双光纤光栅的变宽度椭圆铰链式低频加速度传感器。首先建立传感器的结构模型,理论分析了传感器的振动响应特性,给出该传感器的谐振频率及灵敏度的公式。随后搭建了传感单元的数学模型,对传感单元结构的关键尺寸参数进行了优化。另外,利用有限元仿真验证了理论分析结果,最后加工制作了传感器样件,对其进行加速度性能测试。实验结果表明:传感器的谐振频率约为36 Hz,工作频带为0-10 Hz,灵敏度为1496 pm/g。所设计的传感器具有较高的灵敏度、良好的温度补偿能力,能够满足工程中低频振动检测的要求。
In response to the requirement of high-precision measurement of the low-freque ncy vibration signal,a variable width elliptical hinged low-frequency acceleration sensor based on double fiber Bragg gratings is designed in this paper.Firstly,the structure mo del of the sensor is established,the vibration response characteristics of the sensor are analyze d theoretically,and the resonant frequency and sensitivity formula of the sensor are given.Then the mathematical model of sensor unit is established,and the key dimension paramete rs of the sensing unit structure are optimized.In addition,the theoretical analysis resu lts are verified by finite element simulation.Finally,the sensor sample is manufactured and its ac celeration performance is tested.The experimental results show that the resonance frequenc y of the sensor is 36Hz,while the working frequency band is 0-10Hz,in which the sensitivity is 1496pm/g.The designed sensor has high sensitivity,and temperature compensation ability,which can be used for low-frequency vibration measurement.
作者
刘文敏
戴玉堂
魏禹
LIU Wenmin;DAI Yutang;WEI Yu(National Engineering Lab of Fiber Optic Sensing Technology,Wuhan University of Technology,Wuhan,Hubei 430070,China)
出处
《光电子．激光》
CAS
CSCD
北大核心
2021年第9期911-918,共8页
Journal of Optoelectronics·Laser
基金
国家重点研发计划(2017YFC0804403)资助项目。
关键词
加速度传感器
低频振动
椭圆铰链
优化设计
accelerometer
low-frequency vibration
elliptical hinge
optimization design
