摘要
为了克服环境湿度变化对微移液管探针结构读写稳定性的不利影响,本文首先设计了一种混合室和工作室的双气室结构,在工作室的内置隔板上均匀分布小孔形成均匀的微气流,确保工作室内湿度均匀并减小对工作点气流扰动的影响。然后,通过数值模拟验证了设置混合室和工作室双气室结构的合理性,且以小于0.06 m•s^(-1)流速对工作室进行双侧充气时,对工作点的气流扰动小于50μm•s^(-1)。制作实物并实验表明,该系统能够在5分钟内将工作室的湿度控制在给定值(环境温度25℃),且相对湿度的稳态误差为2.59%;通过控制环境湿度,对比不同湿度条件下微移液管探针电沉积(写)结构质量和扫描(读)成像质量,发现该环境湿度控制方法能够满足微移液探针微纳读写的工作要求。该方法对提高基于移液管探针微结构制造和检测的稳定性和可靠性具有重要的现实意义。
To overcome the adverse effects of environmental humidity changes on structural reading and writing using a micropipette probe,this study designs a double air chamber structure with mixing and working chambers,and evenly distributes the air flow holes in the partitioning in the work chamber to form a uniform micro air flow.The purpose of these designs is to ensure uniform humidity in the micro-nano processing area of the working chamber and reduce the impact of air flow disturbance on the micro-nano working area.Then,the rationality of the double-air chamber structure with mixing and working compartments was verified by numerical simulation.When the working chamber is inflated on both sides with a flow rate of less than 0.06 m·s^(-1),airflow disturbance at the working point is less than 50μm·s^(-1).Experiments using homemade experimental equipment demonstrated that the system can maintain the humidity of the working chamber at a given value(ambient temperature 25℃)for a duration of 5 min,with a steady-state error in relative humidity of 2.59%.Comparing the micropipette probe electrodeposition(write)structure quality and scanning(read)imaging quality at different humidities revealed that the environmental humidity control method can meet the work requirements of micropipette probe micro-nano reading and writing.Therefore,the microenvironment humidity control method has important practical significance for improving the stability and reliability of micropipette-based probe micro structure manufacturing and detection.
作者
廖晓波
庄健
程磊
杨九林
郑强强
LIAO Xiao-bo;ZHUANG Jian;CHENG Lei;YANG Jiu-lin;ZHENG Qiang-qiang(School of Mechanical Engineering,Xi'an Jiaotong University,Xi′an 710049,China;School of Manufacturing Science and Engineering,Key Laboratory of Testing Technology for Manufacturing Process,Minsitry of Education,Southwest University of Science and Technology,Mianyang 621010,China)
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2021年第10期2432-2443,共12页
Optics and Precision Engineering
基金
国家自然科学基金项目(No.51375363)
四川省科技厅创业人才资助项目(No.2020JDRC0072)。
关键词
微移液管探针制造与检测
微环境湿度控制
数值仿真优化
micro-pipette manufacturing and detection
micro-environment humidity control
numerical simulation optimization
