摘要
石英玻璃在研磨过程中引入的亚表面损伤影响着下一步工序的去除量和加工效率,对于研磨石英亚表面损伤开展三维检测能够更加准确地指导优化加工工艺。利用偏振激光共聚焦系统对研磨石英玻璃的亚表面损伤进行层析扫描实验,通过对亚表面损伤信号图像特点的分析,提出插值算法提高图像分辨率。根据共聚焦系统特点对亚表面损伤信号进行图像处理,获取亚表面损伤二维分布,利用MIMICS软件对层析扫描结果进行三维重构,得到亚表面损伤的三维分布。此方法能够定量获得研磨石英玻璃亚表面损伤的完整三维信息,对研磨石英玻璃的工艺优化提供有效检测手段。
The subsurface damage introduced in the lapping process of quartz glass affects the removal amount and processing efficiency of the successive step.The subsurface damage of lapped quartz glass was studied by using a polarization laser confocal system.By analyzing the image characteristics of subsurface damage signal,an interpolation algorithm was proposed to improve the image resolution.Based on the characteristics of confocal system,the subsurface damage signal was processed to obtain the subsurface damage distribution.The three-dimensional distribution of subsurface damage was obtained by using Mimics software.The method can quantitatively obtain complete three-dimensional information of subsurface damage of lapped quartz glass.The non-destructive detection method for the subsurface damage of lapped quartz can provide the guidance to theprocess optimization.
作者
马浩
吕启鑫
白倩
Ma Hao;Lyu Qixin;Bai Qian(Key Laboratory for Precision&Non-traditional Machining of the Ministry of Education,Dalian University of Technology,Dalian,Liaoning 116024,China)
出处
《机电工程技术》
2021年第10期64-66,152,共4页
Mechanical & Electrical Engineering Technology
关键词
亚表面损伤
共聚焦成像
石英玻璃
插值方法
三维重构
subsurface damage
confocal imaging
quartz glass
interpolation
3D reconstruction
