摘要
作为全球集成电路消费市场最大的国家,我国对集成电路配套装备的需求很大,而且随着我国集成电路设备领域科技的发展、技术的进步,进口设备部分必将成为国产化设备的巨大市场空间。本文针对以光刻机、化学机械研磨设备、离子注入机及湿法设备为代表的电子制造装备,依托Incopat专利数据库开展分析,包括电子制造装备领域专利态势、行业主要竞争者分析,提出关于我国电子制造装备领域的未来发展方向的建议。
As the largest country in the global IC consumer market,China has a great demand for IC supporting equipment.With the development of science and technology and technological progress in the field of IC equipment,the imported equipment will become a huge market space for domestic equipment.This paper analyzes the electronic manufacturing equipment represented by lithography machine,chemical mechanical grinding equipment,ion implantation machine and wet equipment,relying on the incopat patent database,including the patent situation in the field of electronic manufacturing equipment and the analysis of major competitors in the industry,and puts forward some suggestions on the future development direction of China's electronic manufacturing equipment field.
作者
陈欣
高香珍
薛敬伟
田培
CHEN Xin;GAO Xiangzhen;XUE Jingwei;TIAN Pei(Information Science Academy of CETC,Beijing,100083 China)
出处
《科技创新导报》
2021年第19期55-58,62,共5页
Science and Technology Innovation Herald
关键词
电子制造装备
光刻机
化学机械研磨设备
离子注入机
专利分析
竞争者分析
Electronic manufacturing equipment
Lithography machine
Chemical mechanical grinding equipment
Ion implanter
Patent analysis
Competitor analysis
