摘要
石墨烯由于独特的物理化学性质成为电子器件研发的热点材料。近年来,在石墨烯材料的器件化发展过程中,激光加工技术起到了重要的推动作用。本文综述了激光加工石墨烯在传感器与执行器方面的研究进展,介绍了三种常见的激光加工制备石墨烯材料的方法,包括激光还原石墨烯氧化物、激光诱导石墨烯生成和激光剪裁石墨烯,同时详细阐述了激光加工石墨烯材料在传感器和执行器方面的研究进展,最后对激光加工石墨烯材料在未来的发展与应用进行了总结与展望。
Significance Graphene is a two-dimensional carbon crystal with a single atomic layer,which was first discovered using the "Scotch tape method"in 2004.Compared with other carbon materials,graphene has shown unique physical and chemical properties,such as high carrier mobility(150000 cm2·V-1·s-1),high thermal conductivity,high Young′s modulus,optical transmittance,flexibility,and biocompatibility.Because of these properties,graphene has become a common material in electronic,energy storage,optical,micromachining,and biological devices.The unique physical and chemical properties of graphene have stimulated the rapid development of graphene preparation technology.Researchers have developed a mature system of graphene preparation methods,such as mechanical/chemical exfoliation of graphite,silicon carbide epitaxial growth method,and chemical vapor deposition(CVD).According to the different applications of graphene,there are various advantages and disadvantages of different preparation methods.The mechanically exfoliated graphene has a better crystal structure,but lower preparation efficiency;the CVD method is effective to prepare high-quality graphene,but transferring graphene from metal catalytic substrates to target substrates is necessary for electronic devices;reduced graphene oxide(RGO)can be prepared in batch,but there exist several defects.The different properties of graphene are determined by the different preparation methods so that the application fields are not the same.No matter what device it is applied to,the processing of graphene is the primary technical problem to be solved.Thus,the devicebased processing of graphene is a critical challenge for its practical applications.Laser processing technology has numerous advantages such as fast processing speed,controllable processing procedure,unaffected by harsh reaction conditions,high precision and flexibility,friendly environment,and largescale preparation.Therefore,it has become a simple and effective method for the preparation,modification,and device
作者
刘雨晴
张嘉芮
韩冬冬
孙洪波
Liu Yuqing;Zhang Jiarui;Han Dongdong;Sun Hongbo(State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instrument,Tsinghua University,Beijing 100084,China;State Key Laboratory of Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun,Jilin 130012,China)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2021年第15期164-180,共17页
Chinese Journal of Lasers
基金
国家重点研发计划(2017YFB1104300)
国家自然科学基金(51575309,51210009)
清华大学自主科研计划(2018Z05JZY009)。
