摘要
ESD是LCD生产过程中经常会遇到的问题,生产过程中的各个环节都有可能产生静电放电现象。文中结合LCD生产过程中遇到的实际情况,对静电产生的原因展开认真研究。通过理论分析和实验验证,当ITO膜层表面结晶存在很多尖峰的时候,由于微电产和电势差的原因,很容易出现静电放电现象、烧伤甚至烧断ITO走线。根据试验验证了靶材使用时间、温度和气氛工艺,结果发现,气氛工艺的调整是有效解决ESD问题的方法。通过气氛工艺的调整,LCD的ESD测试性能达到了目标要求,生产的ESD不良比例从18.9%下降到了0.002%以下,通过改善提高了产品品质,降低了生产成本,取得了很好的经济效益。
Electro static discharge(ESD) is a problem often met in liquid crystal display(LCD) production,which may produce in every process. Based on the actual situation met in the process, the reasons for ESD are studied. Through theoretical analysis and experimental verification, if there are many sharp peaks in the crystallization of the Indium Tin Oxide(ITO) film, due to the micro-electricity and the potential difference, it is easy to cause electrostatic discharge, which burns or even breaks down the ITO traces. The target use time, temperature and atmosphere technology are verified, and the results show that the adjustment of the atmosphere technology is an effective method to solve ESD problem. Through atmosphere technology adjustment, ESD testing performance of LCD reaches the requirements, and the proportion of defective ESD decreases from 18.9% to less than 0.002%. Through improvements, product quality is improved, production cost is reduced and good economic benefits are achieved.
作者
黄琛
张幼莲
HUANG Chen;ZHANG You-lian(Shantou Goworld Display Co.Ltd.,Shantou,China;Shantou Quality Metrology Supervision and Testing Institute,Shantou,China)
出处
《光电技术应用》
2021年第4期51-54,共4页
Electro-Optic Technology Application
关键词
ESD
ITO烧伤
ITO表面形貌
气氛工艺
electro static discharge(ESD)
Indium Tin Oxide(ITO)burning
ITO surface morphology
atmosphere technology
