摘要
基于严格耦合波分析(RCWA)方法研究了红外光波与碳化硅(SiC)光栅结构间的相互作用,尤其是结构在10微米到14微米波段的吸收及热辐射特性。计算得到了光栅的吸收/发射谱,验证了表面声子共振的激发,分析了光栅周期、光栅深度、占空比和入射角度对吸收特性的影响。在横磁(TM)波入射下,光栅周期及深度的增加均导致吸收峰/发射峰的红移;占空比对辐射性能也会产生较大的影响,改变占空比,在光栅全反带出现了吸收峰,还影响着吸收峰位置及幅值;入射角度变大时,吸收谱/发射谱峰值呈现减小势态。本文的研究结果可以拓展到其它极化晶体材料中。
The absorption and thermal radiation characteristics of the silicon carbide gratings within the wavelength range from 10 m to 14 m are studied and analyzed by the rigorous coupled wave analysis(RCWA)method.Influences of different physical parameters(period,depth,filling factor and incident angle)on the spectral properties are discussed in detail.The conclusions are as follows:Under TM-polarization,the period,grating depth,grating width and incidence have a significant effect on the absorption/emission spectral.With the increasing of the period and the grating depth,the absorption peak/emission peak will redshift and the peak will decrease.While the filling factor(f)decreases,the absorption peak appears within the Restrahlen band,and the smaller the f is,the larger the absorption peak is.When the incident angle is increased,the peak value of absorption/emission spectrum decreases.The conclusions of this study can also be extended to other polar crystal materials.
作者
鲍森
王宗缇
郑改革
BAO Sen;WANG Zongti;ZHENG Gaige(Department of Electronics Engineering, Nanjing Xiaozhuang University, Nanjing, 210017;School of Information Science and Technology, Shanghai Tech University, Shanghai, 201210;Jiangsu Collaborative Innovation Center on Atmospheric Environment and Equipment Technology, Nanjing University of Information Science & Technology, Nanjing 210044)
出处
《光散射学报》
2021年第1期79-83,共5页
The Journal of Light Scattering
基金
江苏省自然科学基金(BK20191396)。
关键词
碳化硅
表面声子共振
光栅
Silicon Carbide
Surface phonon polaritons
Grating