摘要
随着光纤技术的发展,光纤器件的结构越来越复杂,功能越来越多样,体积也越来越小,这对光纤器件的加工提出了很大的挑战。飞秒激光双光子聚合方法具有突破光学衍射极限的超高加工精度和无掩模直写的真三维加工能力,在微纳结构加工中拥有独特优势,为微纳结构与光纤集成提供了一种全新的思路和可能性。介绍飞秒激光双光子聚合制备光纤微纳结构器件方向的最新研究进展、应用前景与展望。
With the development of optical fiber technology, optical fiber devices have more complex structure,more diverse functions, and more compact size. This poses a great challenge to the microfabrication of optical fiber devices. Femtosecond laser induced two-photon polymerization has the advantages of ultrahigh processing accuracy which breaks through the optical diffraction limit and true three-dimensional processing ability of direct writing without mask. It has unique advantages in the processing of micro/nano-structure, and provides a new idea and possibility for the integration of micro/nano-structure and optical fiber. In this paper, the latest research progress and application prospect of femtosecond laser induced two-photon polymerization for fiber integrated micro/nanostructured devices are introduced.
作者
廖常锐
李博哲
邹梦强
熊聪
朱梦
余建
李驰
王义平
Liao Changrui;Li Bozhe;Zou Mengqiang;Xiong Cong;Zhu Meng;Yu Jian;Li Chi;Wang Yiping(Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province,College of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen,Guangdong 518060,China;Shenzhen Key Laboratory of Photonic Devices and Sensiyig Systems for Internet of Things,Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors,Shenzhen University,Shenzhen,Guangdong 518060,China)
出处
《激光与光电子学进展》
CSCD
北大核心
2021年第13期62-74,共13页
Laser & Optoelectronics Progress
基金
国家自然科学基金(61635007,62075136)
广东省国际科技合作项目(2020A0505100066)
深圳市优秀科技青年人才培养项目(RCYX20200714114524139)。
关键词
光纤光学
双光子聚合
飞秒激光
光纤器件
微纳结构
光学微腔
微透镜器件
fiber optics
two-photon polymerization
femtosecond laser
optical fiber device
micro/nano-structure
optical micro-cavity
microlens device
