摘要
应对半导体、航空航天、量测、光学等工程行业上金属反射镜重量轻、刚度高、强度高的需求,研究基于选择性激光熔覆工艺,结合拓扑优化与有限元分析方法,采用仿伞骨设计与四面体晶格填充方案,设计与制造了3D打印高性能反射铝镜。仿真与制造验证结果表明,相较于传统钻孔减重方案,基于3D打印二次设计的铝镜减重了19.5%,自重下最大变形降低了34.9%,一阶模态提升了36.1%,从而很好地满足了轻量化、高刚度、高模态的工程需求。
In order to supply the low weight, high strength and high stiffness demand of metal mirror used in semiconductor, aerospace, measuring and optical industries, this paper studies the design and manufacturing of high quality aluminum mirror based on selective laser melting(SLM) process via topology optimization and other CAE methods. The mirror design adopts umbrella-bone structure with tetrahedral-type lattice filled. The simulation and manufacturing results show compared to traditional drilling lightweight mirrors, the optimized 3 D printed one achieves a weight loss of 19.5%, a self-weight deformation decrease of 34.9%, and a constrained modal increase of 36.1%, meeting the high stiffness and lightweight requirement of engineering application.
作者
崔建波
赵仁洁
CUI Jianbo;ZHAO Renjie(Shanghai Micro Electronics Equipment(Group)Co.,Ltd,Shanghai 201203,China)
出处
《集成电路应用》
2021年第7期40-42,共3页
Application of IC
基金
上海市发展和改革委员会(XA4300089-2017-604)光刻机产业化课题。
关键词
选择性激光熔覆
反射铝镜
拓扑优化
模态
高性能
selective laser melting
aluminum mirror
topology optimization
modal
high quality
