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Reaction Processes at the Initial Stage of Diamond Nucleation on the Surface of Si(111)

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摘要 The thermal behavior of CHx(x=2,3)radicals and H atoms adsorbed on Si(111)surface was investigated by high-resolution electron-energy-loss spectroscopy,quadrupole mass spectrometry,and low-energy electron diffraction.Based on the analysis of thermal desorption mass spectrometry,the initial stage of diamond nucleation on Si is speculated.Compared with the result reported by Lee for diamond,it is concluded that low stability of hydrocarbon species on Si is the basic reason which results in the difficulty of diamond nucleation on perfect Si surface.
作者 XIE Fang-qing ZHANG Qing-zhe LIN Zhang-da 谢仿卿;张青哲;林彰达(State Key Laboratory of Surface Physics,Institute of Physics,Chinese Academy of Sciences,Beijing 100080)
出处 《Chinese Physics Letters》 SCIE CAS CSCD 1998年第12期910-912,共3页 中国物理快报(英文版)
基金 Supported by the National Natural Science Foundation of China under Grant No.59632010.
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