摘要
随着水下探测技术的发展,为满足水听器更精准的定位和更远距离的探测要求,提出了一种基于微电子机械系统(MEMS)的压阻式一体化矢量水听器。设计了一套能够将硅纤毛与二氧化硅悬臂梁相集成的工艺方案,以期解决长期以来由于纤毛二次集成带来的一致性误差。对水听器的性能进行有限元仿真分析,通过应力仿真得出理论上能够将其灵敏度提高约11.3 dB,模态分析表明其具有更宽的工作频带,证明该方案能够有效优化水听器的性能。介绍了该方案的具体工艺流程及重点工艺步骤,完成了一体化矢量水听器的制备。通过扫描电子显微镜(SEM)进行形貌观测,得到悬臂梁长为247μm、宽为121μm、厚为3.3μm,与设计指标基本一致,验证了工艺设计的合理性。对压敏单元进行电阻测试,得到了线性度很高的I-V特性曲线,说明其欧姆接触良好。分别对4个悬臂梁上的压敏电阻进行电阻测试,阻值均为(7 000±50)Ω,表明电阻的一致性很好,符合矢量水听器的设计需求。
With the development of the underwater detection technology, a piezoresistive integrated vector hydrophone based on micro-electromechanical system(MEMS) was proposed to meet more accurate positioning and longer-distance detection requirements of the hydrophone. A set of process scheme that can integrate the silicon cilium and silicon dioxide cantilever beams was designed to solve the consistency error caused by the secondary integration of the cilium for a long time. The performance of the hydrophone was analyzed by finite element simulation, and the stress simulation shows that the sensitivity can be increased theoretically by about 11.3 dB. The modal analysis shows that it has a wider working frequency band, proving the efficient optimization of the hydrophone performances by the scheme. The specific process flow and key process steps in the scheme were introduced, and the fabrication of the integrated vector hydrophone was completed. The morphology was observed by the scanning electron microscope(SEM). The results shows that the cantilever beam length is 247 μm, the cantilever beam width is 121 μm, and the cantilever beam thickness is 3.3 μm, which are basically consistent with the design indexes, verifying the rationality of the process design. The resistance test of the pressure-sensitive unit was carried out, a high-linearity I-V characteristic curve was obtained, indicating its good Ohmic contact. The resistance of the piezoresistors on the four cantilever beams was tested. And the result shows that the resistance values are all(7 000±50) Ω, indicating that the resistance consistency is very good and meeting the design requirements of the vector hydrophone.
作者
齐秉楠
苗晋威
史一明
任子明
王任鑫
Qi Bingnan;Miao Jinwei;Shi Yiming;Ren Ziming;Wang Renxin(State Key Laboratory of Dynamic Testing Technology,North University of China,Taiyuan 030051,China;Micro and Nano Technology Research Center,North University of China,Taiyuan 030051,China;Key Laboratory of Sonar Technology,Hangzhou 310000,China)
出处
《微纳电子技术》
CAS
北大核心
2021年第8期693-699,737,共8页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(51875535)
国防科技重点实验室基金资助项目(6142109KF201804)。
