摘要
通过在感知层中加入定制化的微型光谱感知节点,近红外(NIR)光谱传感物联网(IoT)实现了NIR光谱分析技术和IoT技术的集成应用,进而可以满足IoT感知层中对物质成分传感的应用需求。近年来,中国科学院上海技术物理研究所依托成熟的InGaAs焦平面探测器技术,与山东大学联合,在NIR光谱传感IoT的研究和应用上取得了良好进展。首先,介绍了NIR光谱传感IoT的系统架构和关键技术。接着,为了实现光谱感知节点的微型化设计,重点介绍了集成多通道滤光片和集成线性渐变滤光片的两种微型光谱组件结构及其波长定标方法,并结合制备工艺对光谱组件的性能展开对比和分析。最后,基于集成式光谱组件,进一步介绍了NIR光谱感知节点、云服务器和手机客户端的研究应用情况,并对NIR光谱传感IoT的未来发展进行展望。
Significance A variety of sensing applications in the Internet of Things(IoT)raise the diverse needs for sensors.The sensing ability of material composition is a weak part of the sensing layer of the IoT.Due to the technical limitations,traditional analysis methods,such as mass spectrometry and chromatography,cannot be directly applied in the field of the IoT.With the advantages of speediness,lossless and high-efficiency,the technology of near-infrared(NIR)spectroscopy can be applied to the applications of composition analysis.In recent years,the trend of commercialization of spectral analysis has promoted the development of miniaturization,networking and imaging of analytical equipment.The devices based on filters and array detectors are compact without moving parts,which makes them ideal for IoT applications.The miniaturized instruments have been successfully applied in many industrial and agricultural production fields such as petrochemical industry,grain screening,and pharmaceutical industry.With the successful application of machine learning and deep learning,NIR spectral analysis has an intelligent trend of component sensing.InGaAs focal plane arrays(FPAs)have the advantages of working near room temperature,high detection rate,good uniformity and stability,which are beneficial to realize the miniaturization design of the NIR photoelectric system.As the core photoelectric sensor,InGaAs FPAs are widely used in NIR spectral analysis equipments.This paper introduces the key technologies of the NIR spectral sensing IoT with several kinds of compact InGaAs spectral sensors.Progress NIR spectral sensing IoT(Fig.1)integrates spectral analysis techniques by using customized micro spectral sensing nodes.In recent years,Shanghai Institute of Technical Physics,Chinese Academy of Sciences and Shandong University have made good progresses in the research and application of the NIR spectral sensing IoT based on InGaAs FPAs.Spectral sensing nodes can be regarded as customized NIR spectrometers improved by miniaturization,n
作者
王绪泉
王丽丽
方家熊
Wang Xuquan;Wang Lili;Fang Jiaxiong(State Key Laboratories of Transducer Technology,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;Advanced Research Center for Optics,Shandong University,Qingdao,Shandong 266237,China;University of Chinese Academy of Sciences,Beijing 100049,China)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2021年第12期317-327,共11页
Chinese Journal of Lasers
基金
国家自然科学基金(62075229)
安徽省科技重大专项(S202003a06020001)
山东省重点研发计划(2019GGX104003)
传感技术联合国家重点实验室开放课题(SKT1907)。
关键词
近红外光谱学
焦平面探测器
铟镓砷
线性渐变滤光片
物联网
infrared spectroscopy
focal plane detector
InGaAs
linear variable filter
Interent of Things
