摘要
介绍了激光三角法高度测量技术和基于数字信号处理器DSP与线阵CCD的激光高度测量系统。采用比例恒流源和镜像恒流源组合,设计了输出功率稳定可调的激光二极管驱动电路和线阵CCD的驱动电路,借助DSP定时器周期调节灵活的优点,方便地调节光积分时间来提高信号质量。针对光刻工艺中不同的测量对象表面的光学特征,自动进行激光二极管增益控制和光积分时间调节,提高测量的适应性和测量效率。
This article briefly introduces the laser triangulation height measurement technology,and the laser height measurement system based on digital signal processor DSP and linear array CCD.Using a combination of proportional constant current source and mirror constant current source,a laser diode drive circuit with stable and adjustable output power is designed.The driving circuit of the linear CCD is given.With the advantage of flexible adjustment of the DSP timer period,it is convenient to adjust the light integration time to improve the signal quality.According to the optical characteristics of different measuring object surfaces,the laser diode gain control and light integration time adjustment are automatically performed to improve the adaptability and efficiency of measurement.
作者
赵英伟
郝晓亮
张文雅
马培圣
文黎波
Zhao Yingwei;Hao Xiaoliang;Zhang Wenya;Ma Peisheng;Wen Libo(The 13th Research Institute of China Electronics Technology Group Coporation,Shijiazhuang 050051,China)
出处
《电子技术应用》
2021年第8期120-122,132,共4页
Application of Electronic Technique
基金
河北省省级科技计划资助(20351803D)。`。
关键词
激光三角法
线阵CCD
数字信号处理器
光刻机
laser triangulation
linear array CCD
digital signal processor DSP
lithography machine
