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Initial Growth of Thin Films with Low Nucleus Density and Linear Lateral Growth Rate on a Substrate Surface

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摘要 Based on corrected rate equations,the kinetics is revealed for initial growth of thin films with low nucleus density and linear lateral growth rate on a substrate surface.In this case,the mobility and coalescence terms in rate equations are neglected,and the coverage term takes a dominant role.All the calculated results are in agreement with experimental data.These results introduce a new scaling in the case of dominant coverage,which is different from the those in the case of coalescence or mobility in a dominant role.
作者 SHAO Qing-Yi FANG Rong-Chuan ZHU Kai-Gui LIAO Yuan XUE Zeng-Quan 邵庆益;方容川;朱开贵;廖源;薛增泉(Structure Research Laboratory and Department of Physics,University of Science and Technology of China,Hefei 230026;Department of Electronics,Peking University,Beijing 100871)
出处 《Chinese Physics Letters》 SCIE CAS CSCD 2001年第8期1135-1137,共3页 中国物理快报(英文版)
基金 Supported by the National Advanced Material Commit tee of China under Grant No.863-715-002-003 the National Natural Science Foundation of China under Grant No.69890221。
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