摘要
Based on corrected rate equations,the kinetics is revealed for initial growth of thin films with low nucleus density and linear lateral growth rate on a substrate surface.In this case,the mobility and coalescence terms in rate equations are neglected,and the coverage term takes a dominant role.All the calculated results are in agreement with experimental data.These results introduce a new scaling in the case of dominant coverage,which is different from the those in the case of coalescence or mobility in a dominant role.
基金
Supported by the National Advanced Material Commit tee of China under Grant No.863-715-002-003
the National Natural Science Foundation of China under Grant No.69890221。