摘要
Manufacture of large-scale patterned nanomaterials via top-down techniques,such as printing and slurry coating,have been used for fabrication of miniaturized gas sensors.However,the reproducibility and uniformity of the sensors in wafer-scale fabrication are still a challenge.In this work,a“top-down”and“bottom-up”combined strategy was proposed to manufacture wafer-scaled miniaturized gas sensors with high-throughput by in-situ growth of Ni(OH)2 nanowalls at specific locations.First,the micro-hotplate based sensor chips were fabricated on a two-inch(2″)silicon wafer by micro-electro-mechanical-system(MEMS)fabrication techniques(“top-down”strategy).Then a template-guided controllable de-wetting method was used to assemble a porous thermoplastic elastomer(TPE)thin film with uniform micro-sized holes(relative standard deviation(RSD)of the size of micro-holes<3.5%,n>300),which serves as the patterned mask for in-situ growing Ni(OH)2 nanowalls at the micro-hole areas(“bottom-up”strategy).The obtained gas microsensors based on this strategy showed great reproducibility of electric properties(RSD<0.8%,n=8)and sensing response toward real-time H _(2)S detection(RSD<3.5%,n=8).
基金
This work was supported by the National Key R&D Program of China(2017YFA0701101,2018YFB1304700)
the National Natural Science Foundation of China(61574163,61801473,51702354)
the Foundation Research Project of Jiangsu Province(BK20160392)
the Science Foundation for Distinguished Young Scholars of Jiangsu Province,China(BK20170008).
