摘要
A hybrid integrated light source was developed with a configuration in which a laser diode(LD)array was mounted on a silicon optical waveguide platform for interchip optical interconnection.This integrated light source is composed of 13-channel stripes with a pitch of 20 or 30μm.The output power of each LD in the 400 or 600-μm long LD array was over 40 mW at room temperature without cooling.An output power uniformity was 1.3 dB including an LD array power uniformity.The use of a SiON waveguide with a spot size converter resulted in an optical coupling loss of 1 dB between an LD and SiON waveguide.The integrated light source including 52 output ports demonstrated a reduction in the footprint per channel.We also demonstrated a light source with over 100 output ports in which the number of output ports is increased by using a waveguide splitter and multichip bonding.These integrated light sources are practical candidates for use with photonic integrated circuits for high-density optical interconnection.
基金
This work was granted by the Japan Society for the Promotion of Science(JSPS)through the“Funding Program for World-Leading In-12 novative R&D on Science and Technology(FIRST Program),"initiated by the Council for Science and Technology Policy(CSTP).Part of this work was conducted at the TIASCR and Nano-Processing Facility(NPF)by AIST.
