摘要
为了提升电容式MEMS微波功率传感器的测量灵敏度,本文充分利用传感器的内部空间结构,提出了一种基于对称双悬臂梁结构的电容式微波功率传感器。根据对称式双梁结构的特点,建立了对称双悬臂梁结构的枢纽式机电模型。研究和分析了对称双悬臂梁结构的测量灵敏度和过载功率。实验结果表明,在悬臂梁初始间距相同的条件下,对称双梁结构的测量灵敏度相较传统单梁结构提高了3倍;同时,通过改变悬臂梁的初始间距,可以实现较大范围内传感器测量灵敏度与过载功率两项指标的折中与转化,以满足更加广泛的设计需求。
In order to improve the measurement sensitivity of capacitive MEMS microwave power sensors,the internal space of the sensor was fully utilized,and a novel capacitive microwave power sensor based on symmetric double cantilever beams was proposed in this paper.Based on the structure of symmetric double cantilever beams,a pivoted electro-mechanical model was established,and the measurement sensitivity and overload power of the sensor were researched and analyzed.The results showed that the sensitivity of symmetric double-beam structure was three times higher than that of traditional single-beam structure with the same initial gap of the cantilever beam.Meanwhile,a wide-range tradeoff between sensor’s sensitivity and overload power could be realized by changing the initial gap of the cantilever beam.Therefore,the proposed symmetric double-beam structure could meet design demand widely.
作者
左文
刘琪才
张聪淳
王德波
ZUO Wen;LIU Qicai;ZHANG Congchun;WANG Debo(College of Elec.and Optical Engineer.&College of Microelec.,Nanjing Univ.of Posts and Telecommun.,Nanjing 210023,P.R.China)
出处
《微电子学》
CAS
北大核心
2021年第3期418-423,共6页
Microelectronics
基金
国家青年自然科学基金资助项目(61704086)
中国博士后科学基金资助项目(2017M621692)
江苏省博士后基金资助项目(1701131B)
南京邮电大学国自基金孵化资助项目(NY215139,NY217039)。
