摘要
本文采用十二烷基苯磺酸钠(SDBS)与聚乙烯吡咯烷酮(PVP)的复配溶液作为单晶硅制绒添加剂,取代目前常用碱醇制绒液中的异丙醇,不仅降低了绒面的反射率、缩短了制绒时间,而且具有成本低、制绒过程中不需要定时补充等特点。本文研究了SDBS与PVP复配添加剂的比例、浓度、反应时间、反应温度等对单晶硅制绒效果的影响,实验发现当SDBS与PVP的混合体积比为1∶4、复配添加剂的浓度为0.26%(质量分数)、制绒温度为80℃、制绒时间为15 min时,在400~1000 nm波长范围内的平均反射率为9.8%。与传统的碱醇制绒液相比,SDBS与PVP复配添加剂的制绒时间缩短了25 min,反射率降低约2%,是一种非常有发展潜力的产业化单晶硅制绒添加剂。
In this paper,a compound solution of sodium dodecylbenzene sulfonate(SDBS)and polyvinylpyrrolidone(PVP)was used as a texturing additive to replace the isopropyl alcohol(IPA)commonly used at in monocrystalline silicon texturing process.It not only reduces the reflectivity of the texturing surface and shortens the time for texturing,but also has the characteristics of low cost and no need for regular supplementation during the texturing process.The ratio,concentration,reaction time,and reaction temperature of SDBS and PVP compound additives on the effect of monocrystalline silicon texturing were investigated.The average reflectance in the wavelength range of 400 nm to 1000 nm is 9.8%when monocrystalline silicon is textured with the mixing volume ratio of SDBS and PVP of 1∶4,the concentration of compound additives of 0.26%(mass fraction),the texturing temperature of 80℃,and the texturing time of 15 min.Compared with the traditional alkali alcohol texturing liquid,this compound additive not only reduces the reflectivity of the texturing surface by about 2%and shortens the texturing time by 25 min,but also has the advantages of low cost and no need to replenish the texturing liquid regularly during the texturing process.At the same time,based on the unique solubilizing and dispersing properties of surfactants,it can effectively improve the cleanliness of the silicon wafer surface.The article also found that by controlling the ratio of PVP and SDBS,the size of the texture can be changed to a certain extent.Therefore,the compound surfactant is a kind of industrial monocrystalline silicon texturing additive with great development potential.
作者
张嘉华
康桥
黄仕华
ZHANG Jiahua;KANG Qiao;HUANG Shihua(Department of Materials Science and Engineering,Zhejiang Normal University,Jinhua 321004,China)
出处
《人工晶体学报》
CAS
北大核心
2021年第6期1096-1103,共8页
Journal of Synthetic Crystals
基金
国家重点研发计划(2018YFB1500102)。
