摘要
工业加热炉中,受高温环境的影响一般探测器无法测量工件的真实温度。针对工业加热炉温度检测问题,设计了多晶硅红外探测器实时测温系统。通过黑体炉对探测器的输出与环境温度的关系、以及光电转换性能进行测试;结果为工作环境温度超过30℃时输出急剧减小,且随着目标温度升高,动态范围减小。设计在探测器前端增加衰减片和一种具有夹层结构的防护罩,结果表明该系统有效拓展了多晶硅红外探测器的动态范围,保障探测器的环境温度在30℃范围内,测量精度达到0.85℃,满足工业要求,解决了多晶硅红外探测器在工业加热炉上的应用。
In the industrial heating furnace, due to the influence of high temperature environment, the general detector cannot measure the real temperature of the workpiece.Aiming at the temperature detection of industrial heating furnace, a real-time temperature measurement system of polysilicon infrared detector is designed. The relationship between the detector output and the ambient temperature, as well as the photoelectric conversion performance were tested by blackbody furnace, the results show that the output decreases sharply when the working environment temperature exceeds 30 ℃, with the increase of target temperature, the dynamic range decreases. The design adds an attenuator in front of the detector and a protective cover with sandwich structure, the results show that the system effectively expands the dynamic range of the polysilicon infrared detector and ensures that the ambient temperature of the detector is within 30 ℃, the measurement accuracy reaches 0.85 ℃, which meets the industrial requirements, and solves the application of polysilicon infrared detector in industrial heating furnace.
作者
刘纯红
熊丹枫
余龙宝
吴海滨
Liu Chunhong;Xiong Danfeng;Yu Longbao;Wu Haibin(School of Physics and Materials Engineering,Hefei Normal University,Hefei 230601,China;The Research Center of Photoelectric Sensing Engineering Technology of Anhui Province,Hefei 230601,China)
出处
《电子测量技术》
北大核心
2021年第6期54-58,共5页
Electronic Measurement Technology
基金
安徽省高校自然科学研究重点项目(KJ2020A0125)资助。
关键词
工业加热炉
多晶硅红外探测器
动态范围
衰减片
the industrial heating furnace
the polysilicon infrared detector
dynamic range
attenuator
